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59 条记录 (耗时 0.026 秒)

    Linear motor apparatus
    2.
    发明授权
    Linear motor apparatus 失效

    公开(公告)号：US06984945B2

    公开(公告)日：2006-01-10

    申请号：US10667356

    申请日：2003-09-23

    申请人： Mikio Sato

    发明人： Mikio Sato

    IPC分类号： H02K41/00

    CPC分类号： G03F7/70758 ,  G05B2219/41337 ,  H02K29/06 ,  H02K41/03 ,  H02P25/06

    摘要： A linear motor apparatus which drives a mover of a linear motor in a stable manner, by using only information on change of relative position, without using an absolute value sensor. The apparatus has a coil array of plural phases of coils and a magnet relatively movable to the coil array, plural drivers, at least one of which being provided for each phase, to feed a current to all the same phase coils of the coil array, a sensor for measuring a change of relative position of the magnet moved by the current to the coil array, and a controller to determine the polarity of the current applied to the same phase coils based on the change of the relative position measured by the sensor, and apply a drive current to drive the magnet in a desired direction to the same phase coils.

    Control apparatus, a stage apparatus and a hard disk servo writer apparatus including a robust stabilizing compensator
    3.
    发明授权
    Control apparatus, a stage apparatus and a hard disk servo writer apparatus including a robust stabilizing compensator 失效
    控制装置，平台装置以及包括稳健补偿器的硬盘伺服写入装置

    公开(公告)号：US5726879A

    公开(公告)日：1998-03-10

    申请号：US401677

    申请日：1995-03-10

    申请人： Mikio Sato

    发明人： Mikio Sato

    IPC分类号： G05B13/02 ,  G03F7/20 ,  G05B5/01 ,  G05B13/04 ,  G05B19/19 ,  G05D3/12 ,  G05B19/18 ,  G11B21/02

    CPC分类号： G03F7/70725 ,  G03F7/709 ,  G05B13/042 ,  G05B19/19 ,  G05B5/01 ,  G05B2219/41367 ,  G05B2219/42012 ,  Y02P90/265

    摘要： Provided is high-performance H.sub..infin. control technology suitable for position control or speed control of semiconductor exposure apparatus, servo writer of hard disk, etc. A series compensator in the classical control technology represented by the PID compensator is employed as a frequency weight of loop shaping, whereby the design technology in the conventional classical control can be succeeded to and a high-performance control system can be realized even for cases where there is an oscillation mode of a controlled object to become a problem on control performance in the servo band, which was difficult to realize by the classical control technology. Also, using a robust stabilizing compensator obtained from a generalized plant having constant matrix weights, a high-performance control system can be realized even for cases where there is an oscillation mode of the controlled object to become a problem on control performance in the servo band, which was difficult to realize by the conventional classical control technology.

    摘要翻译： 提供适用于半导体曝光装置，硬盘伺服写入器等的位置控制或速度控制的高性能H INFINITY控制技术。采用PID补偿器代表的经典控制技术中的串联补偿器作为循环的频率权重 可以使传统的经典控制中的设计技术成功，并且即使在控制对象的振荡模式成为伺服带中的控制性能的问题的情况下也能够实现高性能的控制系统， 这是经典控制技术难以实现的。 此外，使用从具有恒定矩阵权重的广义工厂获得的鲁棒稳定补偿器，即使在受控对象的振荡模式成为伺服带的控制性能的问题的情况下，也可以实现高性能控制系统 ，这是传统的古典控制技术难以实现的。

    Stage driving system
    8.
    发明授权
    Stage driving system 失效
    舞台驾驶系统

    公开(公告)号：US5504407A

    公开(公告)日：1996-04-02

    申请号：US19579

    申请日：1993-02-18

    申请人： Shinji Wakui ,  Mikio Sato ,  Katsumi Asada

    发明人： Shinji Wakui ,  Mikio Sato ,  Katsumi Asada

    IPC分类号： G03F7/20 ,  G05B19/19 ,  G06F15/46

    CPC分类号： G03F7/70733 ,  G03F7/70716 ,  G03F7/709 ,  G05B19/195

    摘要： A stage driving system capable of positioning an object with a higher speed and a higher precision than prior systems. The system includes a base member, plural movable members provided on the base member, and a controller for controlling the plural movable members so as to substantially suppress the vibration of the base member caused by the displacements of the plural movable members.

    摘要翻译： 一种舞台驱动系统，能够以比现有系统更高的速度和更高的精度定位物体。 该系统包括基座构件，设置在基座构件上的多个可动构件，以及用于控制多个可动构件的控制器，以便基本上抑制由多个可动构件的位移引起的基座构件的振动。

    Adaptive apparatus
    9.
    发明授权
    Adaptive apparatus 失效
    自适应装置

    公开(公告)号：US5305193A

    公开(公告)日：1994-04-19

    申请号：US469375

    申请日：1990-01-24

    申请人： Shinji Shinnaka ,  Mikio Sato ,  Masahiro Morisada

    发明人： Shinji Shinnaka ,  Mikio Sato ,  Masahiro Morisada

    IPC分类号： G05B13/02 ,  G06F15/46

    CPC分类号： G05B13/024

    摘要： In an adaptive apparatus for adaptively adjusting parameters in a system, the parameters of the system are adjusted in accordance with an integral relationship. At that moment, one or both of a scalar and a matrix which depend on time are used as gains. Furthermore, adjustment in accordance with a proportional relationship is used together. Also in this adjustment, one or both of a scalar and a matrix which depend on time are used as gains.

    摘要翻译： 在用于自适应地调整系统中的参数的自适应装置中，根据积分关系来调整系统的参数。 在那一刻，一个或两个标量和一个取决于时间的矩阵被用作增益。 此外，根据比例关系进行调整。 同样在该调整中，依赖于时间的标量和矩阵中的一个或两者被用作增益。

    Mechanically secured wool filter cartridge
    10.
    发明授权
    Mechanically secured wool filter cartridge 失效
    机械固定羊毛滤芯

    公开(公告)号：US5006242A

    公开(公告)日：1991-04-09

    申请号：US357935

    申请日：1989-05-26

    申请人： Mikio Sato ,  Tsuneo Yamaguchi

    发明人： Mikio Sato ,  Tsuneo Yamaguchi

    IPC分类号： B01D27/04 ,  B01D24/08 ,  B01D29/11

    CPC分类号： B01D24/08

    摘要： There is disclosed a fluid filtration element having a porous core cylinder, a sectionally thick filtration cylinder fitted around the core cylinder, and end plates secured to the end surfaces of filtration cylinder. Highly densified portions are formed at the filtration cylinder ends to which the end plates are press-fitted, thereby hindering the fluid permeation. Sectionally thin protrusions erected on the end plate surfaces are cut into the highly densified portions.

    摘要翻译： 公开了一种流体过滤元件，其具有多孔芯筒，围绕芯筒安装的截面厚的过滤缸，以及固定到过滤缸的端面的端板。 高密度部分形成在过滤筒端部，端板被压配到端部，从而阻碍流体渗透。 在端板表面上竖立的横截面薄的突起被切割成高度致密的部分。