发明授权
- 专利标题： Pulse power generating circuit with energy recovery
- 专利标题（中）： 具有能量回收的脉冲发电电路
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申请号： US739873申请日： 1996-10-31
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公开(公告)号： US5729562A公开(公告)日： 1998-03-17
- 发明人: Daniel L. Birx , Palash P. Das , Igor V. Fomenkov , William N. Partlo , Tom A. Watson
- 申请人： Daniel L. Birx , Palash P. Das , Igor V. Fomenkov , William N. Partlo , Tom A. Watson
- 申请人地址： CA San Diego CA Oakley
- 专利权人： Cymer, Inc.,Advanced Pulse Power Technologies, Inc.
- 当前专利权人： Cymer, Inc.,Advanced Pulse Power Technologies, Inc.
- 当前专利权人地址： CA San Diego CA Oakley
- 主分类号： H01S3/00
- IPC分类号： H01S3/00 ; H01S3/097 ; H01S3/225 ; H02M9/04 ; H03K3/57 ; H03K17/00 ; H03K17/80 ; H05H1/06
摘要：
A high voltage pulse power generating circuit capable of providing energy recovery is disclosed. The energy efficient pulse generating circuit source comprises a high voltage charge storing element which is periodically discharged into a compressor circuit. An energy recovery circuit coupled to the compressor circuit reverses the polarity of energy dissipated by the pulse power generating circuit and transfers the waste energy back to the power source. In a preferred embodiment, the pulse power generating circuit of the present invention utilizes an SCR switch for periodically discharging the charge storing element. This embodiment of the present invention provides pulses consistently and will not provide even a single missed pulse.
公开/授权文献
- US5147625A Process for the preparation of phosphorous acid 公开/授权日：1992-09-15
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