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    Alignment of laser resonator
    1.
    发明授权
    Alignment of laser resonator 失效
    激光谐振器的对准

    公开(公告)号：US5812584A

    公开(公告)日：1998-09-22

    申请号：US689865

    申请日：1996-08-15

    申请人： Tom A. Watson ,  Peter J. Bailey ,  Philip J. Marusek

    发明人： Tom A. Watson ,  Peter J. Bailey ,  Philip J. Marusek

    IPC分类号： H01S3/02 ,  H01S3/08 ,  H01S3/086

    CPC分类号： H01S3/086 ,  H01S3/08081 ,  H01S3/025

    摘要： A method for aligning reflective surfaces in an unstable laser resonator is provided herein. By providing the outwardly facing side of the front mirror of the resonator with a reflective positioning surface (46) having an optical axis (80) coincident with the optical axis (82) of the front mirror (44), alignment procedures are greatly simplified. The alignment method comprises the steps of fabricating a support surface having a support plate (42) and a front reflective surface (44) on its inner surface, the front reflective surface having a primary optical axis (82). A positioning reflective surface (46) is affixed to an outer surface of the support plate, the positioning reflective surface having a secondary optical axis (80) coincident with the primary optical axis. The support plate also has means for securing the support surface to the laser resonator. The method also comprises positioning a laser emitter in a predetermined orientation with the laser resonator and placing a rear reflective surface in a substantially perpendicular orientation to the laser emitter. The laser emitter transmits a laser beam, and the rear reflective surface is aligned such that the laser beam is reflected off the rear reflective surface and back upon itself. The method also comprises securing the support surface to the laser resonator and applying the laser beam from the laser emitter to the positioning reflective surface. Finally, the resonator is adjusted such that the laser beam is reflected off the positioning reflective surface back upon itself, providing alignment of both laser reflective surfaces.

    摘要翻译： 本文提供了一种用于对准不稳定激光谐振器中的反射表面的方法。 通过提供具有与前反射镜（44）的光轴（82）重合的光轴（80）的反射定位表面（46）的谐振器的前反射镜的朝外侧，对准过程被大大简化。 对准方法包括以下步骤：在其内表面上制造具有支撑板（42）和前反射表面（44）的支撑表面，所述前反射表面具有主光轴（82）。 定位反射表面（46）固定到支撑板的外表面，定位反射表面具有与主光轴重合的次光轴（80）。 支撑板还具有用于将支撑表面固定到激光谐振器的装置。 该方法还包括将激光发射器与激光谐振器定位成预定取向，并将后反射表面放置在与激光发射器基本垂直的方向上。 激光发射器传输激光束，并且后反射表面对准，使得激光束从后反射表面反射并且背靠自身。 该方法还包括将支撑表面固定到激光谐振器并将来自激光发射器的激光束施加到定位反射表面。 最后，谐振器被调整成使得激光束从定位反射表面反射回自身，从而提供两个激光反射表面的对准。

    Tangential fan with cutoff assembly and vibration control for electric discharge laser
    6.
    发明授权
    Tangential fan with cutoff assembly and vibration control for electric discharge laser 有权
    切向风扇切割组件和放电激光器的振动控制

    公开(公告)号：US6034984A

    公开(公告)日：2000-03-07

    申请号：US310786

    申请日：1999-05-12

    申请人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

    发明人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

    IPC分类号： G03F7/20 ,  H01S3/036 ,  H01S3/225 ,  H01S3/22

    CPC分类号： H01S3/036 ,  G03F7/708 ,  H01S3/225

    摘要： A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.

    摘要翻译： 用于再循环激光气体混合物的切向风扇和切割组件具有叶片构件，其周向位置从端到端逐渐变化，和/或锥形阳极组件。 刀片构件的数量可以在端部之间是恒定的或可变的。 叶片构件的圆周位置可以在端部之间单调或可逆地移动。 叶片构件通过最佳地选择轮毂构件的数量和布置来控制风扇的固有振动频率而变硬。 形成切向风扇的方法包括从固体块铸造和加工。 通常可以通过电子束焊接来连接整体结构。 铸造，焊接和加工过程不会引起额外的污染物。 生产的切向风扇具有机械刚度，精度公差和污染物浓度低。 叶片构件可以形成为空气箔形状。

    Fluorine control system for excimer lasers
    9.
    发明授权
    Fluorine control system for excimer lasers 失效
    准分子激光器氟控制系统

    公开(公告)号：US5978406A

    公开(公告)日：1999-11-02

    申请号：US16525

    申请日：1998-01-30

    申请人： Shahryar Rokni ,  Tom A. Watson ,  David J. Tammadge

    发明人： Shahryar Rokni ,  Tom A. Watson ,  David J. Tammadge

    IPC分类号： G03F7/20 ,  H01S3/036 ,  H01S3/225

    CPC分类号： G03F7/70558 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/225

    摘要： An excimer laser with a laser gas containing fluorine in which the fluorine concentration is maintained continuously at or substantially at desired predetermined levels. A real time or substantially real time fluorine monitor provides a feedback signal to a fluorine flow control system which provides continuous fluorine injection flow into the laser chamber to precisely compensate for fluorine depletion and maintain fluorine concentration precisely at desired levels. In a preferred embodiment, fluorine detector which may be a chemical detector periodically measures the fluorine concentration in laser gas discharged from the laser in order to calibrate the real time or substantially real time fluorine monitor. In a second preferred embodiment, the continuous inlet flow is from two gas sources, one containing fluorine, a noble gas and a buffer gas and the other containing only the noble gas and the buffer gas. In a third embodiment, the continuous inlet flow is from a gas source containing fluorine, a noble gas and a buffer gas and filtered gas discharged from the laser.

    摘要翻译： 一种具有氟的激光气体的准分子激光，其中氟浓度连续地保持在或基本上保持在期望的预定水平。 实时或基本上实时的氟监测器向氟流量控制系统提供反馈信号，该氟流量控制系统提供连续的氟注入流入激光室以精确补偿氟耗尽，并将氟浓度精确保持在所需水平。 在优选实施例中，可以是化学检测器的氟检测器周期性地测量从激光器排出的激光气体中的氟浓度，以校准实时或实质上实时的氟监测器。 在第二优选实施例中，连续入口流是来自两个气体源，一个​​含氟，惰性气体和缓冲气体，另一个仅含有惰性气体和缓冲气体。 在第三实施例中，连续入口流是从含有氟，惰性气体和缓冲气体的气体源和从激光器排出的过滤气体。