- 专利标题： Fractionation of phenol formaldehyde condensate and photoresist compositions produced therefrom
-
申请号： US530847申请日： 1995-09-20
-
公开(公告)号： US5739265A公开(公告)日： 1998-04-14
- 发明人: M. Dalil Rahman , Daniel P. Aubin , Dinesh N. Khanna , Sunit S. Dixit
- 申请人： M. Dalil Rahman , Daniel P. Aubin , Dinesh N. Khanna , Sunit S. Dixit
- 申请人地址： VGX
- 专利权人： Clariant Finance (BVI) Ltd.
- 当前专利权人： Clariant Finance (BVI) Ltd.
- 当前专利权人地址： VGX
- 主分类号： G03F7/004
- IPC分类号： G03F7/004 ; C08G8/00 ; C08G8/08 ; C08L61/06 ; G03F7/023 ; C08J3/00 ; G03C7/022
摘要：
A process for producing a water insoluble, aqueous alkali soluble, film forming novolak resin having low metal ions, made by the fractionation of a phenol formaldehyde condensation product, a process for producing a resin a photoresist composition of superior quality containing such novolak resin, and a method for producing a semiconductor device using such photoresist composition.
公开/授权文献
- US5158760A .sup.99m TC labeled liposomes 公开/授权日：1992-10-27
信息查询
IPC分类:
