发明授权
- 专利标题: Laser having improved beam quality and reduced operating cost
- 专利标题(中): 激光器具有改善的光束质量和降低的操作成本
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申请号: US583302申请日: 1996-01-05
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公开(公告)号: US5748656A公开(公告)日: 1998-05-05
- 发明人: Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
- 申请人: Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
- 申请人地址: CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: CA San Diego
- 主分类号: H01S3/03
- IPC分类号: H01S3/03 ; H01S3/036 ; H01S3/04 ; H01S3/041 ; H01S3/225 ; H01S3/045
摘要:
Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
公开/授权文献
- USD244100S Golf club grip 公开/授权日:1977-04-19
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