发明授权
US5750899A Capacitive pressure sensor with sensing element mechanically isolated
from the casing
失效
电容式压力传感器,其传感元件与外壳机械隔离
- 专利标题: Capacitive pressure sensor with sensing element mechanically isolated from the casing
- 专利标题(中): 电容式压力传感器,其传感元件与外壳机械隔离
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申请号: US929030申请日: 1997-09-15
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公开(公告)号: US5750899A公开(公告)日: 1998-05-12
- 发明人: Frank Hegner , Elke Maria Schmidt , Ulfert Drewes , Rainer Martin
- 申请人: Frank Hegner , Elke Maria Schmidt , Ulfert Drewes , Rainer Martin
- 申请人地址: DEX Weil am Rhein
- 专利权人: ENVEC Mess- und Regeltechnik GmbH + Co.
- 当前专利权人: ENVEC Mess- und Regeltechnik GmbH + Co.
- 当前专利权人地址: DEX Weil am Rhein
- 优先权: EPX95113064 19950819; EPX96810394 19960614
- 主分类号: G01L9/12
- IPC分类号: G01L9/12 ; G01L9/00 ; G01L19/04 ; G01L19/14 ; G01L7/00 ; G01L7/08
摘要:
To provide a flush-mounted and corrosion-resistant pressure sensor for measuring the pressure of a medium which, on the one hand, is very rugged and, on the other hand, has a casing (2) mechanically isolated from the sensing element (1) as perfectly as possible, and whose measured values exhibit little temperature dependence and little hysteresis, the casing (2) has an internal space (21) and is preferably pot-shaped for receiving the sensing element (1). An annular, particularly annular-disk-shaped, flexible connecting element (3), disposed between the casing (2) and the sensing element (1), and the sensing element close the interior space (21) toward the medium to be measured, and a liquid (4) fills the enclosed interior space (21).
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