摘要:
In this method for producing capacitive alumina-ceramic absolute pressure sensors sorted in high-precision zero-point long-term stability defect classes referred to a measured-value span c.sub.sp, the sensors are firstly produced conventionally: a substrate is provided with an annular first electrode and, at the center, a circular second electrode insulated from the first; a diaphragm is provided with a third electrode, and the substrate and diaphragm are joined tightly together in a vacuum by the mutually facing electrodes, at an outer edge through the interposition of an active brazing ring with the formation of a chamber, with the result that a pressure-dependent capacitance C.sub.p and a pressure-independent capacitance C.sub.r are produced. Then, using the equation c=(C.sub.p -C.sub.r)/C.sub.p =k.sub.1 (p-p.sub.0)+k.sub.0, at room temperature and under a vacuum (=p.fwdarw.0) a first zero value c.sub.n1 =-k.sub.1 p.sub.0 +k.sub.0 is determined by means of a capacitance zero-point measuring device having the zero-point measuring error F.sub.n. A second zero value c.sub.n2 =-k.sub.1 p.sub.0 '+k.sub.0 is determined for each sensor by means of the same measuring device after the sensors have been stored in a gas during a period t in such a way that the pressure and/or temperature of the gas was raised, or its molecular weight was lowered, with respect to normal atmospheric conditions. Then the difference .delta.c.sub.n between the first and second zero values .delta.c.sub.n =c.sub.n1 -c.sub.n2 =-k.sub.1 .delta.p.sub.0 is formed, and the value .delta.c.sub.n /c.sub.sp is compared with the value F.sub.n /c.sub.sp. It is also possible to make use analogously of the zero-point temperature coefficient.
摘要:
To ensure insensitivity to electromagnetic interference and to charge influences from the oil fill and achieve good long-term stability, this pressure-measuring arrangement comprises: a pressure sensor having a base and an associated diaphragm with strain gages deposited thereon; a header of insulating material with leads and with an oil filler neck, said header of insulating material having the base mounted thereon, and said leads making electrical contacts to the strain gages; a metal body having a first central recess in a first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and said first recess accommodating the substrate and diaphragm without touching them; an electrically conductive foil having an opening, said foil being disposed in the first recess as close as possible to, and covering but not touching, the strain gages and connected to ground; a metallic separating diaphragm fitted in the second recess and closing the latter at its edge; and an oil fill in the recesses and in the hole.
摘要:
This process serves to form a long-time-vacuum-tight, high-strength, and corrosion-resistant joint, by means of a joining material, between a first body and a second body each made of sintered, polycrystalline alumina ceramic with a purity greater than 92 wt. % or of sapphire. The joining material is interposed in the form of a paste, a foil, or a slip between the first body and the second body. The joining material has been made from 1) an agglomerate-free, highly disperse, high-purity .alpha.-alumina powder with particles of as high a degree of calcination as possible and of a size not exceeding 100 nm (=10.sup.-7 m), 2) an anorganic oxidic powder of an auxiliary sintering agent with particles of approximately the same size as the particle size of the .alpha.-alumina powder, 3) an organic vehicle which is dissolved or suspended in an organic or aqueous solvant and in which the particles of the respective powder are distributed as evenly as possible. Instead of the anorganic oxidic powder of an auxiliary sintering agent an anorganic oxidic auxiliary sintering agent produced chemically as envelopes around or attachment to the particles of the .alpha.-alumina powder can be used, the total .alpha.-alumina and auxiliary-sintering-agent content of the paste, the foil, or the slip ranging between 50% and 70%. After interposing the joining material the bodies are heated to a temperature of not more than 1,300.degree. C. and then allowing them to cool down.
摘要:
With regard to a significant reduction in the tolerance range or margin to be taken into account in the design of a switched-capacitor circuit which is monolithically integrated by means of enhancement-mode insulated-gate field-effect transistors there is provided at least one opamp. This opamp contains a resistor which determines its quiescent current and is realized as a transistor operated in the permanently current-conducting state. An on-chip clock oscillator generates a clock signal. This oscillator is either an RC clock oscillator, whose frequency is determined by an oscillator resistor, which is realized as a transistor operated in the permanently current-conducting state, and an oscillator capacitor, or a current-controlled clock oscillator, whose frequency is determined by the quiescent current of the opamp. At least one capacitor is charged or discharged during operation by the opam via at least one switch in the form of a transistor clocked by the clock signal.
摘要:
This circuit arrangement has the property of an amplifier with a set or adjustable non-inverting gain and contains an opamp (3) having an a non-inverting and an inverting input (31, 32) as well as an output (33) which is also a signal output (A) of the circuit arrangement, and a current copier (8) having a current input and a current output. The noninverting input (31) is connected to a first reference potenial (P.sub.1) and the output (33) via a first resistor (1) to the inverting input (32). The input (E) of the circuit arangement is connected via a second resistor (2) to the current input of the current copier (8) the current output of which is connected to the inverting input (32). The output section of the current copier is connected to a second reference potential (P.sub.2) and its input section to the first reference potential.
摘要:
To provide a flush-mounted and corrosion-resistant pressure sensor for measuring the pressure of a medium which, on the one hand, is very rugged and, on the other hand, has a casing (2) mechanically isolated from the sensing element (1) as perfectly as possible, and whose measured values exhibit little temperature dependence and little hysteresis, the casing (2) has an internal space (21) and is preferably pot-shaped for receiving the sensing element (1). An annular, particularly annular-disk-shaped, flexible connecting element (3), disposed between the casing (2) and the sensing element (1), and the sensing element close the interior space (21) toward the medium to be measured, and a liquid (4) fills the enclosed interior space (21).