Method for producing capacitive ceramic absolute pressure sensors sorted
in zero-point long-term stability defect classes
    1.
    发明授权
    Method for producing capacitive ceramic absolute pressure sensors sorted in zero-point long-term stability defect classes 失效
    用于生产以零点长期稳定性缺陷等级分类的电容式陶瓷绝对压力传感器的方法

    公开(公告)号:US5836063A

    公开(公告)日:1998-11-17

    申请号:US811708

    申请日:1997-03-05

    摘要: In this method for producing capacitive alumina-ceramic absolute pressure sensors sorted in high-precision zero-point long-term stability defect classes referred to a measured-value span c.sub.sp, the sensors are firstly produced conventionally: a substrate is provided with an annular first electrode and, at the center, a circular second electrode insulated from the first; a diaphragm is provided with a third electrode, and the substrate and diaphragm are joined tightly together in a vacuum by the mutually facing electrodes, at an outer edge through the interposition of an active brazing ring with the formation of a chamber, with the result that a pressure-dependent capacitance C.sub.p and a pressure-independent capacitance C.sub.r are produced. Then, using the equation c=(C.sub.p -C.sub.r)/C.sub.p =k.sub.1 (p-p.sub.0)+k.sub.0, at room temperature and under a vacuum (=p.fwdarw.0) a first zero value c.sub.n1 =-k.sub.1 p.sub.0 +k.sub.0 is determined by means of a capacitance zero-point measuring device having the zero-point measuring error F.sub.n. A second zero value c.sub.n2 =-k.sub.1 p.sub.0 '+k.sub.0 is determined for each sensor by means of the same measuring device after the sensors have been stored in a gas during a period t in such a way that the pressure and/or temperature of the gas was raised, or its molecular weight was lowered, with respect to normal atmospheric conditions. Then the difference .delta.c.sub.n between the first and second zero values .delta.c.sub.n =c.sub.n1 -c.sub.n2 =-k.sub.1 .delta.p.sub.0 is formed, and the value .delta.c.sub.n /c.sub.sp is compared with the value F.sub.n /c.sub.sp. It is also possible to make use analogously of the zero-point temperature coefficient.

    摘要翻译: 在这种以高精度零点长期稳定性缺陷类别(称为测量值跨度csp)分类的电容式氧化铝 - 陶瓷绝对压力传感器的制造方法中,传感器首先按常规制造:基板设置有环状的第一 并且在中心处具有与第一电极绝缘的圆形第二电极; 隔膜设置有第三电极,并且基板和隔膜通过相互面对的电极在真空中紧密地连接在外边缘处,通过插入活性钎焊环形成室,结果是 产生压力依赖电容Cp和压力无关电容Cr。 然后,在室温和真空(= p-> 0)下使用等式c =(Cp-Cr)/ Cp = k1(p-p0)+ k0,确定第一零值cn1 = -k1p0 + k0 通过具有零点测量误差Fn的电容零点测量装置。 在传感器在时间t内以气体存储在气体中之后,通过相同的测量装置为每个传感器确定第二零值cn2 = -k1p0'+ k0,使得气体的压力和/或温度 相对于正常大气条件升高,或其分子量降低。 然后,形成第一和第二零值δcn = cn1-cn2 = -k1 delta p0之间的差值δn,并将值δcn / csp与值Fn / csp进行比较。 也可以类似于零点温度系数使用。

    Pressure-measuring arrangement with conductive foil shielding
    2.
    发明授权
    Pressure-measuring arrangement with conductive foil shielding 失效
    带导电箔屏蔽的压力测量装置

    公开(公告)号:US5551303A

    公开(公告)日:1996-09-03

    申请号:US349608

    申请日:1994-12-05

    摘要: To ensure insensitivity to electromagnetic interference and to charge influences from the oil fill and achieve good long-term stability, this pressure-measuring arrangement comprises: a pressure sensor having a base and an associated diaphragm with strain gages deposited thereon; a header of insulating material with leads and with an oil filler neck, said header of insulating material having the base mounted thereon, and said leads making electrical contacts to the strain gages; a metal body having a first central recess in a first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and said first recess accommodating the substrate and diaphragm without touching them; an electrically conductive foil having an opening, said foil being disposed in the first recess as close as possible to, and covering but not touching, the strain gages and connected to ground; a metallic separating diaphragm fitted in the second recess and closing the latter at its edge; and an oil fill in the recesses and in the hole.

    摘要翻译: 为了确保对电磁干扰的不敏感和对填充油的影响并且实现良好的长期稳定性,该压力测量装置包括:压力传感器,其具有沉积在其上的应变计的基座和相关联的隔膜; 具有导线和带有填充油口的绝缘材料的头部,所述绝缘材料的头部安装有基座,所述引线与应变计电接触; 金属体,其具有在第一横截面中的第一中心凹部,在远离第一横截面的第二横截面中的第二中心凹部,以及将第一凹部与第二凹部连接的孔, 第一横截面在其边缘处紧密地连接到绝缘材料的头部,并且所述第一凹部容纳衬底和隔膜而不接触它们; 具有开口的导电箔,所述箔设置在所述第一凹部中尽可能靠近并覆盖而不接触所述应变计并连接到地; 金属分离膜,其装配在第二凹部中并在其边缘封闭; 并在油槽中填充油。

    Process for joining alumina ceramic bodies
    3.
    发明授权
    Process for joining alumina ceramic bodies 失效
    氧化铝陶瓷体的接合方法

    公开(公告)号:US5954900A

    公开(公告)日:1999-09-21

    申请号:US935417

    申请日:1997-09-23

    摘要: This process serves to form a long-time-vacuum-tight, high-strength, and corrosion-resistant joint, by means of a joining material, between a first body and a second body each made of sintered, polycrystalline alumina ceramic with a purity greater than 92 wt. % or of sapphire. The joining material is interposed in the form of a paste, a foil, or a slip between the first body and the second body. The joining material has been made from 1) an agglomerate-free, highly disperse, high-purity .alpha.-alumina powder with particles of as high a degree of calcination as possible and of a size not exceeding 100 nm (=10.sup.-7 m), 2) an anorganic oxidic powder of an auxiliary sintering agent with particles of approximately the same size as the particle size of the .alpha.-alumina powder, 3) an organic vehicle which is dissolved or suspended in an organic or aqueous solvant and in which the particles of the respective powder are distributed as evenly as possible. Instead of the anorganic oxidic powder of an auxiliary sintering agent an anorganic oxidic auxiliary sintering agent produced chemically as envelopes around or attachment to the particles of the .alpha.-alumina powder can be used, the total .alpha.-alumina and auxiliary-sintering-agent content of the paste, the foil, or the slip ranging between 50% and 70%. After interposing the joining material the bodies are heated to a temperature of not more than 1,300.degree. C. and then allowing them to cool down.

    摘要翻译: 该方法用于通过连接材料在第一主体和第二主体之间形成长时间真空密封,高强度和耐腐蚀的接头,每个第一主体和第二主体由具有纯度的烧结多晶氧化铝陶瓷制成 大于92wt。 %或蓝宝石。 接合材料以第一主体和第二主体之间的糊状物,箔片或滑动片的形式插入。 接合材料由1)无聚集高分散,高纯度的α-氧化铝粉末制成,该粉末具有尽可能高的煅烧程度且尺寸不超过100nm(=10-7μm) 2)一种辅助烧结剂的无机氧化粉末,其颗粒大小与α-氧化铝粉末的粒度大致相同,3)有机载体,其溶解或悬浮在有机或水溶液中,其中 各粉末的颗粒尽可能均匀地分布。 代替辅助烧结剂的无机氧化物粉末,可以使用以α-氧化铝粉末的颗粒包围或附着于其上化学形成的无机氧化物辅助烧结剂,总α-氧化铝和辅助烧结剂的总量 糊,箔或滑差在50%至70%之间。 在插入接合材料之后,将本体加热至不高于1300℃的温度,然后使其冷却。

    Monolithic MOS-SC circuit
    4.
    发明授权
    Monolithic MOS-SC circuit 失效
    单片MOS-SC电路

    公开(公告)号:US6147541A

    公开(公告)日:2000-11-14

    申请号:US935870

    申请日:1997-09-23

    申请人: Petrus H. Seesink

    发明人: Petrus H. Seesink

    IPC分类号: H03K3/0231 G06G7/19

    CPC分类号: H03K3/0231

    摘要: With regard to a significant reduction in the tolerance range or margin to be taken into account in the design of a switched-capacitor circuit which is monolithically integrated by means of enhancement-mode insulated-gate field-effect transistors there is provided at least one opamp. This opamp contains a resistor which determines its quiescent current and is realized as a transistor operated in the permanently current-conducting state. An on-chip clock oscillator generates a clock signal. This oscillator is either an RC clock oscillator, whose frequency is determined by an oscillator resistor, which is realized as a transistor operated in the permanently current-conducting state, and an oscillator capacitor, or a current-controlled clock oscillator, whose frequency is determined by the quiescent current of the opamp. At least one capacitor is charged or discharged during operation by the opam via at least one switch in the form of a transistor clocked by the clock signal.

    摘要翻译: 关于在通过增强型绝缘栅场效应晶体管单片集成的开关电容器电路的设计中要考虑的公差范围或余量的显着减小,提供至少一个运算放大器 。 该运算放大器包含一个确定其静态电流的电阻,并被实现为在永久导通状态下工作的晶体管。 片上时钟振荡器产生时钟信号。 该振荡器是RC时钟振荡器,其频率由振荡器电阻决定,振荡器电阻被实现为在永久导通状态下工作的晶体管,以及振荡器电容器或电流控制的时钟振荡器,其频率被确定 通过opamp的静态电流。 至少一个电容器在运行期间由opam通过至少一个以时钟信号为时钟的晶体管形式的开关进行充电或放电。

    Circuit arrangement with an operational amplifier
    5.
    发明授权
    Circuit arrangement with an operational amplifier 失效
    具有运算放大器的电路布置

    公开(公告)号:US5949288A

    公开(公告)日:1999-09-07

    申请号:US899536

    申请日:1997-07-24

    申请人: Petrus H. Seesink

    发明人: Petrus H. Seesink

    IPC分类号: H03G1/00 H03F3/04

    CPC分类号: H03G1/0088

    摘要: This circuit arrangement has the property of an amplifier with a set or adjustable non-inverting gain and contains an opamp (3) having an a non-inverting and an inverting input (31, 32) as well as an output (33) which is also a signal output (A) of the circuit arrangement, and a current copier (8) having a current input and a current output. The noninverting input (31) is connected to a first reference potenial (P.sub.1) and the output (33) via a first resistor (1) to the inverting input (32). The input (E) of the circuit arangement is connected via a second resistor (2) to the current input of the current copier (8) the current output of which is connected to the inverting input (32). The output section of the current copier is connected to a second reference potential (P.sub.2) and its input section to the first reference potential.

    摘要翻译: 该电路装置具有具有设定或可调整的非反相增益的放大器的特性,并且包含具有非反相和反相输入(31,32)的运算放大器(3)以及输出(33),其输出 还有电路装置的信号输出(A)和具有电流输入和电流输出的电流复印机(8)。 同相输入(31)经由第一电阻器(1)连接到第一参考电位(P1)和输出(33)至反相输入端(32)。 电路布置的输入(E)经由第二电阻器(2)连接到电流输出连接到反相输入端(32)的当前复印机(8)的电流输入端。 当前复印机的输出部分连接到第二参考电位(P2),其输入部分连接到第一参考电位。

    Capacitive pressure sensor with sensing element mechanically isolated
from the casing
    6.
    发明授权
    Capacitive pressure sensor with sensing element mechanically isolated from the casing 失效
    电容式压力传感器,其传感元件与外壳机械隔离

    公开(公告)号:US5750899A

    公开(公告)日:1998-05-12

    申请号:US929030

    申请日:1997-09-15

    CPC分类号: G01L19/14 G01L9/0075

    摘要: To provide a flush-mounted and corrosion-resistant pressure sensor for measuring the pressure of a medium which, on the one hand, is very rugged and, on the other hand, has a casing (2) mechanically isolated from the sensing element (1) as perfectly as possible, and whose measured values exhibit little temperature dependence and little hysteresis, the casing (2) has an internal space (21) and is preferably pot-shaped for receiving the sensing element (1). An annular, particularly annular-disk-shaped, flexible connecting element (3), disposed between the casing (2) and the sensing element (1), and the sensing element close the interior space (21) toward the medium to be measured, and a liquid (4) fills the enclosed interior space (21).

    摘要翻译: 为了提供一种用于测量介质的压力的嵌入式和耐腐蚀的压力传感器,其一方面非常坚固,另一方面具有与传感元件(1)机械隔离的壳体(2) ),并且其测量值显示出很小的温度依赖性和很小的滞后,所以壳体(2)具有内部空间(21),并且优选地是盆形以用于接收感测元件(1)。 设置在壳体(2)和感测元件(1)之间的环形的,特别是环形的盘形的柔性连接元件(3),并且感测元件朝向要测量的介质关闭内部空间(21) 并且液体(4)填充封闭的内部空间(21)。