发明授权
- 专利标题: Platinum source compositions for chemical vapor deposition of platinum
- 专利标题(中): 用于铂化学气相沉积的铂源组合物
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申请号: US673372申请日: 1996-06-28
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公开(公告)号: US5783716A公开(公告)日: 1998-07-21
- 发明人: Thomas H. Baum , Peter S. Kirlin , Sofia Pombrik
- 申请人: Thomas H. Baum , Peter S. Kirlin , Sofia Pombrik
- 申请人地址: CT Danbury
- 专利权人: Advanced Technology Materials, Inc.
- 当前专利权人: Advanced Technology Materials, Inc.
- 当前专利权人地址: CT Danbury
- 主分类号: C07C49/12
- IPC分类号: C07C49/12 ; C07C49/167 ; C07C49/92 ; C07F15/00 ; C07F17/02 ; C23C14/26 ; C23C16/18 ; G06F12/00 ; H01L21/02 ; H01L21/285 ; H01L21/8242 ; H01L27/10 ; H01L27/108
摘要:
A platinum source reagent liquid solution, comprising: (i) at least one platinum source compound selected from the group consisting of compounds of the formulae: (A) RCpPt(IV)R'.sub.3 compounds, of the formula: ##STR1## wherein: R is selected from the group consisting of hydrogen, methyl, ethyl, i-propyl, n-propyl, n-butyl, i-butyl, t-butyl, trimethylsilyl and trimethylsilyl methyl; and each R' is independently selected from the group consisting of methyl, ethyl, i-propyl, n-propyl, n-butyl, i-butyl, t-butyl, trimethylsilyl and trimethylsilyl methyl; and (B) Pt(.beta.-diketonates).sub.2 of the formula: ##STR2## wherein: each R" is independently selected from the group consisting of methyl, ethyl, n-propyl, i-propyl, n-butyl, i-butyl, t-butyl, trifluoromethyl, perfluoroethyl, and perfluoro-n-propyl, and (ii) a solvent medium therefor. The platinum source reagent liquid solutions of the invention are readily employed in a chemical vapor deposition process system including a liquid delivery apparatus for volatilizing the source reagent liquid solution and transporting the resulting vapor to the chemical vapor deposition reactor for deposition of platinum on a substrate mounted in the CVD reactor.
公开/授权文献
- US4558568A Method and apparatus for mobilizing geothermal fluid 公开/授权日:1985-12-17