- 专利标题: Solid-state image pick-up device and method for manufacturing the same
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申请号: US654962申请日: 1996-05-29
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公开(公告)号: US5786607A公开(公告)日: 1998-07-28
- 发明人: Katsuya Ishikawa , Takao Kuroda , Yuji Matsuda , Masahiko Niwayama , Keishi Tachikawa
- 申请人: Katsuya Ishikawa , Takao Kuroda , Yuji Matsuda , Masahiko Niwayama , Keishi Tachikawa
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electronics Corporation
- 当前专利权人: Matsushita Electronics Corporation
- 当前专利权人地址: JPX Osaka
- 主分类号: H01L27/148
- IPC分类号: H01L27/148 ; H01L29/768
摘要:
A solid-state image pick-up device having a structure in which the amount of transferred charges is not reduced in a vertical CCD portion even if a pixel portion is made finer, and a method for manufacturing the solid-state image pick-up device are provided. A first p-type well and a second p-type well are formed on an N (100) silicon substrate. A vertical CCD n.sup.+ layer is formed in the second p-type well 3. Then, impurity ions are implanted into a surface layer of the N (100) silicon substrate including an upper layer portion of the vertical CCD n.sup.+ layer to form a p.sup.- layer. An isolating portion for isolating photodiode portions from the vertical CCD n.sup.+ layer and a read control portion for controlling the read of charges from the photodiode n layer are simultaneously formed on a portion adjacent to the vertical CCD n.sup.+ layer.
公开/授权文献
- US5126178A Wafer processing film 公开/授权日:1992-06-30
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