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US5804479A Method for forming semiconductor integrated circuit device having a capacitor 失效
用于形成具有电容器的半导体集成电路器件的方法

Method for forming semiconductor integrated circuit device having a
capacitor
摘要:
The etch-back amount of a silicon oxide film of a memory array which is a higher altitude portion is increased when etching back and flattening the silicon oxide film by arranging a first-layer wiring on a BPSG film covering an upper electrode of an information-storing capacitative element only in a peripheral circuit but not arranging it in the memory array. Thus, a DRAM having a stacked capacitor structure is obtained such that the level difference between the memory array and peripheral circuit is decreased, and the formation of wiring and connection holes are easy.
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