发明授权
- 专利标题: Semiconductor memory device and method for its production
- 专利标题(中): 半导体存储器件及其制造方法
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申请号: US639123申请日: 1996-04-24
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公开(公告)号: US5828092A公开(公告)日: 1998-10-27
- 发明人: Georg Tempel
- 申请人: Georg Tempel
- 申请人地址: DEX Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Munich
- 优先权: DEX95106098.7 19950424
- 主分类号: H01L27/04
- IPC分类号: H01L27/04 ; H01L21/02 ; H01L21/822 ; H01L21/8242 ; H01L21/8246 ; H01L27/10 ; H01L27/105 ; H01L27/108 ; H01L27/115 ; H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113
摘要:
A semiconductor memory device includes a semiconductor substrate having a surface defining a plane extending substantially parallel thereto. A multiplicity of memory cells disposed on the substrate each have a selection transistor disposed in the plane. The transistor has a gate terminal and first and second electrode terminals. Each of the memory cells has a storage capacitor associated with and triggerable by the transistor. The capacitor has a ferroelectric dielectric and first and second capacitor electrodes. The capacitor has a configuration projecting upward from the plane and is disposed inside a trench extending as far as the second electrode terminal of the transistor. A word line is connected to the gate terminal of the transistor, a bit line is connected to the first electrode terminal of the transistor, and a common conductor layer of electrically conductive material is connected to the first capacitor electrode of the capacitor. A method for producing the device includes producing the capacitor after production of the transistor and metallizing layers associated with the transistor for connection of the word and bit lines, in a configuration projecting upward from the plane, and placing the capacitor inside a trench extending as far as the second electrode terminal of the transistor.
公开/授权文献
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