Invention Grant
- Patent Title: Positive resist composition
- Patent Title (中): 正抗蚀剂组成
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Application No.: US419604Application Date: 1995-04-10
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Publication No.: US5843616APublication Date: 1998-12-01
- Inventor: Kunishige Edamatsu , Yuji Yoshida , Kazuhiko Hashimoto , Haruyoshi Osaki
- Applicant: Kunishige Edamatsu , Yuji Yoshida , Kazuhiko Hashimoto , Haruyoshi Osaki
- Applicant Address: JPX Osaka
- Assignee: Sumitomo Chemical Company, Ltd.
- Current Assignee: Sumitomo Chemical Company, Ltd.
- Current Assignee Address: JPX Osaka
- Priority: JPX6-072211 19940411; JPX6-215910 19940909
- Main IPC: G03F7/022
- IPC: G03F7/022 ; C08G8/24 ; G03F7/004 ; G03F7/023 ; H01L21/027
Abstract:
A positive resist composition sensitive to radiations such as ultraviolet rays, far ultraviolet rays, which comprises; an o-quinonediazide compound; and a novolac resin(1) obtained by allowing an aromatic aldehyde of the formula(I) ##STR1## wherein R.sub.4 to R.sub.6 represents hydrogen, alkyl, cycloalkyl, alkoxy, alkenyl or aryl, k'0 represents an integer not smaller than 0 and p represents 1, 2 or 3, to react with a phenol compound of the formula (II) ##STR2## wherein R.sub.7 to R.sub.9 represents hydrogen, hydroxy, alkyl, cycloalkyl, alkoxy, alkenyl or aryl, provided that at least one of R.sub.7 to R.sub.9 is cycloalkyl having 6 or less carbon atoms, in the presence of an acid catalyst to obtain a reaction product(1) containing low molecular weight ingredients; and, then, allowing the reaction product(1) to further react with a phenol compound(1) and formaldehyde.
Public/Granted literature
- US4403950A Fixing device Public/Granted day:1983-09-13
Information query
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