发明授权
- 专利标题: Crystal pulling apparatus
- 专利标题(中): 水晶拉机
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申请号: US763888申请日: 1996-12-11
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公开(公告)号: US5851286A公开(公告)日: 1998-12-22
- 发明人: Atsushi Ozaki , Masahiko Urano , Isamu Harada , Tomohiro Kakegawa , Hideki Nakano
- 申请人: Atsushi Ozaki , Masahiko Urano , Isamu Harada , Tomohiro Kakegawa , Hideki Nakano
- 申请人地址: JPX Tokyo
- 专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人: Shin-Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX7-351277 19951227
- 主分类号: C30B15/00
- IPC分类号: C30B15/00 ; C30B15/14 ; C30B35/00
摘要:
A crystal pulling apparatus is disclosed which employs the Czochralski method. The crystal pulling apparatus is operated while a heater for heating a material melt in a crucible is controlled by the main controller of a main system. When maintenance of a heating state is disabled for some reason, a relay of a signal changeover circuit is switched so as to maintain the heating state under control of the backup controller of a backup system, thereby maintaining the material melt in a molten state. Thus, even when it becomes impossible for the main system to heat the material melt within the crucible, the material melt can be prevented from becoming solidified.
公开/授权文献
- US4090157A Operating handle means for stacked circuit breaker modules 公开/授权日:1978-05-16
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