发明授权
- 专利标题: Piezoelectric film-type element
- 专利标题(中): 压电膜型元件
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申请号: US863723申请日: 1997-05-27
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公开(公告)号: US5852337A公开(公告)日: 1998-12-22
- 发明人: Yukihisa Takeuchi , Koji Kimura , Masao Takahashi
- 申请人: Yukihisa Takeuchi , Koji Kimura , Masao Takahashi
- 申请人地址: JPX
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX8-132045 19960527; JPX9-119598 19970509
- 主分类号: H01L41/09
- IPC分类号: H01L41/09 ; H01L41/08
摘要:
A piezoelectric film-type element includes a piezoelectric operating layer constructed by successively and integrally forming and stacking, on a ceramic substrate, a single flat film-shaped lower electrode, a piezoelectric layer, and an upper electrode comprising a plurality of alternately arranged strip electrodes. The lower electrode is designated as a first electrode, and the upper electrode is designated as a second electrode. A first piezoelectric operating means is constructed by the first and second electrodes and the piezoelectric layer, while a second piezoelectric operating means is constructed by the second electrode and the piezoelectric layer. No other piezoelectric layer is stacked on the foregoing piezoelectric operating layer. Operating characteristics of the piezoelectric operating section can be sufficiently utilized by constructing the piezoelectric film-type element as described above. Thus it is possible to provide a piezoelectric film-type element which has excellent performance, has a compact size and can operate at a low voltage.
公开/授权文献
- US5308431A System providing multiple processing of substrates 公开/授权日:1994-05-03
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