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1.发明授权Piezoelectric/electrostrictive film type elements and process for producing the same 有权压电/电致伸缩膜型元件及其制造方法公开(公告)号：US06518690B2
公开(公告)日：2003-02-11
申请号：US09837546
申请日：2001-04-18
IPC分类号： H01L41187
CPC分类号： B81B3/0021 , H01L41/081 , H01L41/0933 , H01L41/094 , H01L41/0973 , H01L41/314 , H01L41/43 , Y10T29/40 , Y10T29/42 , Y10T29/49155
摘要： An integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要翻译： 具有优异耐久性的集成压电/电致伸缩膜型元件包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过成膜方法集成在陶瓷基板上的压电/电致伸缩操作部分， 压电/电致伸缩操作部分包括下电极，含铅元素组合物的压电/电致伸缩层和上电极，其中在压电/电致伸缩层的表面处的异相发生率被控制在 0.1〜30％。
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公开(公告)号：US5852337A
公开(公告)日：1998-12-22
申请号：US863723
申请日：1997-05-27
申请人： Yukihisa Takeuchi , Koji Kimura , Masao Takahashi
发明人： Yukihisa Takeuchi , Koji Kimura , Masao Takahashi
CPC分类号： H01L41/0973 , H01L41/047
摘要： A piezoelectric film-type element includes a piezoelectric operating layer constructed by successively and integrally forming and stacking, on a ceramic substrate, a single flat film-shaped lower electrode, a piezoelectric layer, and an upper electrode comprising a plurality of alternately arranged strip electrodes. The lower electrode is designated as a first electrode, and the upper electrode is designated as a second electrode. A first piezoelectric operating means is constructed by the first and second electrodes and the piezoelectric layer, while a second piezoelectric operating means is constructed by the second electrode and the piezoelectric layer. No other piezoelectric layer is stacked on the foregoing piezoelectric operating layer. Operating characteristics of the piezoelectric operating section can be sufficiently utilized by constructing the piezoelectric film-type element as described above. Thus it is possible to provide a piezoelectric film-type element which has excellent performance, has a compact size and can operate at a low voltage.
摘要翻译： 一种压电薄膜型元件，包括：在陶瓷基板上依次整体形成和堆叠单个平坦薄膜状下部电极，压电体层和上部电极构成的压电工作层，该单个平面薄膜状下部电极，包括多个交替排列的带状电极 。 下电极被指定为第一电极，上电极被指定为第二电极。 第一压电操作装置由第一和第二电极和压电层构成，而第二压电操作装置由第二电极和压电层构成。 在上述压电工作层上没有其他压电层堆叠。 通过如上所述构造压电膜型元件，可以充分利用压电操作部的工作特性。 因此，可以提供具有优异性能，具有紧凑尺寸并且可以在低电压下操作的压电膜型元件。
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3.发明授权Piezoelectric/electrostrictive film type elements and process for producing the same 失效压电/电致伸缩膜型元件及其制造方法公开(公告)号：US06703257B2
公开(公告)日：2004-03-09
申请号：US10236754
申请日：2002-09-06
IPC分类号： H01L2100
CPC分类号： B81B3/0021 , H01L41/081 , H01L41/0933 , H01L41/094 , H01L41/0973 , H01L41/314 , H01L41/43 , Y10T29/40 , Y10T29/42 , Y10T29/49155
摘要： A process for providing an integrated piezoelectric/electrostrictive film type element with excellent durability, includes a substrate made of a ceramic material composed mainly of completely stabilized or partially stabilized zirconium oxide, and a piezoelectric/electrostrictive operating section integrated onto the ceramic substrate by a film-forming method, the piezoelectric/electrostrictive operating section comprising a lower electrode, a piezoelectric/electrostrictive layer of a lead element-containing composition, and an upper electrode, wherein a heterophase-occurence rate at a surface of the piezoelectric/electrostrictive layer is controlled to a range of 0.1 to 30%.
摘要翻译： 提供具有优异的耐久性的集成压电/电致伸缩膜型元件的方法包括由主要由完全稳定或部分稳定的氧化锆组成的陶瓷材料制成的基板和通过膜整合到陶瓷基板上的压电/电致伸缩操作部 压电/电致伸缩操作部分包括下电极，含铅元素组合物的压电/电致伸缩层和上电极，其中在压电/电致伸缩层的表面处的异相发生率被控制 至0.1〜30％的范围。
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公开(公告)号：US06998763B2
公开(公告)日：2006-02-14
申请号：US10230731
申请日：2002-08-29
IPC分类号： H01L41/08
CPC分类号： H01L41/0973 , B81B3/0035 , G01P15/09 , H01L41/0477 , H03H9/02133 , H03H9/105 , H03H9/12 , H03H9/132 , H03H9/173 , H03H9/176
摘要： A ceramic device has an actuator element which includes a shape-retaining layer, an upper electrode formed on an upper portion of the shape-retaining layer, and a lower electrode formed on a lower portion of the shape-retaining layer. A vibrating section of ceramics supports the actuator element and a fixed section of ceramics vibratingly supports the vibrating section. An electrode material of the lower electrode contacting the vibrating section contains an additive in an amount of 0.01% by weight to 20% by weight. The electrode material contains platinum as a major component, for example. The additive to the electrode material is preferably zirconium oxide, cerium oxide, or titanium oxide.
摘要翻译： 陶瓷器件具有致动器元件，其包括形状保持层，形成在形状保持层的上部上的上电极和形成在形状保持层的下部的下电极。 陶瓷的振动部支承致动元件，陶瓷的固定部振动地支承振动部。 接触振动部的下部电极的电极材料含有0.01重量％〜20重量％的添加剂。 电极材料例如包含铂作为主要成分。 电极材料的添加剂优选为氧化锆，氧化铈或氧化钛。
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公开(公告)号：US6091182A
公开(公告)日：2000-07-18
申请号：US965239
申请日：1997-11-06
CPC分类号： G09G3/3433 , G02B26/08 , G09F9/305 , H01L41/0973 , G09G3/2014 , G09G3/2022 , G09G3/3493
摘要： Disclosed is a piezoelectric/electrostrictive element composed of an actuator section of a uni-morph type comprising a main actuator element including a piezoelectric/electrostrictive layer and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer; a vibrating section which contacts with a second principal surface of the piezoelectric/electrostrictive layer for supporting the main actuator element; and a fixed section for supporting the vibrating section in a vibrative manner; wherein a relationship of y=ax is satisfied, and an expression of 1/10.ltoreq.a.ltoreq.100 is satisfied provided that x represents a distance between the pair of electrodes (1 .mu.m.ltoreq.x.ltoreq.200 .mu.m), and y represents a thickness of the piezoelectric/electrostrictive layer (1 .mu.m.ltoreq.y.ltoreq.100 .mu.m). Accordingly, it is possible to greatly increase the relative displacement amount between the no-voltage-loaded state and the voltage-applied state and the relative displacement amount between the states in which mutually opposite electric fields are applied, making it possible to realize easy control when the element is utilized for actuators and improvement in sensitivity when the element is utilized for sensors.
摘要翻译： 本发明公开了一种压电/电致伸缩元件，由压电/电致伸缩层的第一主表面上形成的包括压电/电致伸缩层的主致动器元件和形成在第一主表面上的一对电极组成的单态致动器部分构成。 与所述压电/电致伸缩层的第二主表面接触以支撑所述主致动器元件的振动部分; 以及用于以振动方式支撑所述振动部分的固定部分; 其中满足y = ax的关系，并且满足+ E，fra 1/10 + EE a = 100的表达式，只要x表示一对电极之间的距离（1μm） = x <200μm），y表示压电/电致伸缩层的厚度（1μm×y =100μm）。 因此，可以大幅提高无负荷状态与施加电压之间的相对位移量和施加相互相反的电场的状态之间的相对位移量，从而可以实现易于控制 当元件用于传感器时，该元件被用于致动器和提高灵敏度。
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6.发明申请CELL DRIVING TYPE PIEZOELECTRIC/ELECTROSTRICTIVE ACTUATOR AND METHOD OF MANUFACTURING THE SAME 失效细胞驱动型压电/电致动力驱动器及其制造方法公开(公告)号：US20070226975A1
公开(公告)日：2007-10-04
申请号：US11756758
申请日：2007-06-01
申请人： Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
发明人： Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
IPC分类号： H02N2/04
CPC分类号： B41J2/14209 , B41J2202/11 , F04B17/003 , F04B43/046 , G02B6/3538 , G02B6/3546 , G02B6/3564 , G02B6/3578 , H01L27/20 , H01L41/0831 , H01L41/273 , Y10T29/42 , Y10T29/49155 , Y10T156/107
摘要： A piezoelectric actuator capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell defined by two side walls, a substrate and a ceiling wall; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls comprising piezoelectric/electrostrictive devices, and the piezoelectric/electrostrictive devices being capable of changing a volume of the cell by displacement of the walls. Each of the piezoelectric/electrostrictive devices comprises a plurality of layered piezoelectric/electrostrictive bodies and electrodes which are alternately stacked, and end portions of the electrodes are embedded in the piezoelectric/electrostrictive bodies in at least the internal side of the cell.
摘要翻译： 一种压电致动器，其能够以高电场强度驱动，获得较大的位移并且电极的导电可靠性高，并且包括：由两个侧壁，基板和顶壁限定的至少一个单元; 所述两个侧壁设置在所述基板上并被顶壁覆盖以限定一个单元，所述至少两个侧壁包括压电/电致伸缩装置，并且所述压电/电致伸缩装置能够通过位移来改变所述电池的体积 的墙壁。 压电/电致伸缩器件中的每一个包括交替堆叠的多个分层压电/电致伸缩体和电极，电极的端部至少在电池的内侧嵌入到压电/电致伸缩体中。
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公开(公告)号：US20050145032A1
公开(公告)日：2005-07-07
申请号：US11060988
申请日：2005-02-18
申请人： Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
发明人： Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
IPC分类号： B06B1/06 , G01G3/16 , G01H11/08 , G01N35/00 , G01P15/09 , G02B26/02 , H01L41/09 , H01L41/113 , H01L41/187 , G01H13/00 , G01G3/13 , G01G9/00
CPC分类号： G01P15/0922 , B06B1/06 , B06B1/0648 , G01G3/16 , G01H11/08 , G01N2035/00217 , G01N2035/00237 , G01N2291/02827 , G01P15/09 , G01P2015/0814 , H01L41/0973 , H01L41/1132
摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.
摘要翻译： 质量传感器，其中连接板和隔膜在其各自的侧面接合在一起; 感测板在垂直于隔膜接合方向的连接板的相应侧面处连接到连接板; 由压电膜和电极构成的压电元件安装在感测板的板表面的至少任一个上; 并且由隔膜，感测板，连接板和压电元件组成的谐振部分接合到传感器基板。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。
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公开(公告)号：US20050082946A1
公开(公告)日：2005-04-21
申请号：US10896769
申请日：2004-07-22
CPC分类号： B81B3/0018 , B81B2201/032 , G02B26/0841 , G02B26/0858 , H01L41/0474 , H01L41/0973 , H04R17/005 , H04R2201/003
摘要： An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing, relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.
摘要翻译： 致动器元件具有板构件，与板构件相对设置的面对的压电/电致伸缩体，以及设置在板构件和压电/电致伸缩体之间的梁，并将压电/电致伸缩体固定到板构件。 压电/电致伸缩体具有压电/电致伸缩层，形成在压电/电致伸缩层的面向板构件的表面上的上电极和形成在与压电/电致伸缩层相对的压电/电致伸缩层的表面上的下电极 其表面面向板构件。 当电场施加到上电极和下电极时，压电/电致伸缩体的一部分朝向或远离板构件移动。
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公开(公告)号：US20050016277A1
公开(公告)日：2005-01-27
申请号：US10925514
申请日：2004-08-25
申请人： Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
发明人： Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
IPC分类号： B06B1/06 , G01G3/16 , G01H11/08 , G01N35/00 , G01P15/09 , G02B26/02 , H01L41/09 , H01L41/113 , H01L41/187 , G01H13/00
CPC分类号： G01P15/0922 , B06B1/06 , B06B1/0648 , G01G3/16 , G01H11/08 , G01N2035/00217 , G01N2035/00237 , G01N2291/02827 , G01P15/09 , G01P2015/0814 , H01L41/0973 , H01L41/1132
摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.
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公开(公告)号：US06476539B1
公开(公告)日：2002-11-05
申请号：US09642861
申请日：2000-08-21
IPC分类号： H01L4108
CPC分类号： H01L41/43 , H01L41/0946
摘要： Provided is a piezoelectric/electrostrictive device comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated based on a drive of the driving portion, and a fixing portion for holding the driving portion and the movable portion, the fixing portion and the movable portions being coupled via the driving portion, and a hole being formed by an inner wall of the driving portion, inner wall of the movable portion, and inner walls of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions and at least two piezoelectric/electrostrictive elements each comprising at least one or more pairs of electrodes and a piezoelectric/electrostrictive layer provided on the thin plate portions.
摘要翻译： 本发明提供一种压电/电致伸缩器件，其特征在于，包括：驱动部，其通过压电/电致伸缩元件的位移驱动;基于所述驱动部的驱动而被驱动的可动部，以及用于保持所述驱动部和 可动部分，固定部分和可动部分经由驱动部分联接，以及由驱动部分的内壁，可移动部分的内壁和固定部分的内壁形成的孔。 驱动部分包括一对相互相对的薄板部分和至少两个压电/电致伸缩元件，每个压电/电致伸缩元件包括至少一对或多对电极和设置在薄板部分上的压电/电致伸缩层。
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