发明授权
US5864064A Acceleration sensor having coaxially-arranged fixed electrode and
movable electrode
失效
具有同轴布置的固定电极和可动电极的加速度传感器
- 专利标题: Acceleration sensor having coaxially-arranged fixed electrode and movable electrode
- 专利标题(中): 具有同轴布置的固定电极和可动电极的加速度传感器
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申请号: US717405申请日: 1996-09-20
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公开(公告)号: US5864064A公开(公告)日: 1999-01-26
- 发明人: Kazuhiko Kano , Yoshinori Ohtsuka , Norio Kitao , Kenichi Ao , Yasutoshi Suzuki
- 申请人: Kazuhiko Kano , Yoshinori Ohtsuka , Norio Kitao , Kenichi Ao , Yasutoshi Suzuki
- 申请人地址: JPX Kariya
- 专利权人: Nippondenso Co., LTD.
- 当前专利权人: Nippondenso Co., LTD.
- 当前专利权人地址: JPX Kariya
- 优先权: JPX07-244306 19950922; JPX08-230769 19960830
- 主分类号: G01P15/00
- IPC分类号: G01P15/00 ; G01H1/00 ; G01P15/02 ; G01P15/08 ; G01P15/125 ; G01P15/135 ; G01P15/18
摘要:
An acceleration sensor is constructed by a substrate, a cylindrical dead-weight movable electrode to be displaced by acceleration, a fixed electrode from the inside of which a cylinder is hollowed, a cylindrical anchor arranged on the substrate for supporting the dead-weight movable electrode with elastic transformable structural material and beams. When acceleration is applied from the outside, the cylindrical detecting face of the dead-weight movable electrode and the cylindrical detected face of the fixed electrode are in contact on a two-dimensional plane parallel to the substrate and the acceleration sensor detects the contact. A radial interval between the detecting face of the dead-weight movable electrode and the detected face of the fixed electrode is set in view of the elastic modulus of the beams so that external force can be detected isotropically and the acceleration sensor detects acceleration on a two-dimensional plane nondirectionally.
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