发明授权
- 专利标题： Method of making charge-coupled device with microlens
- 专利标题（中）： 用微透镜制作电荷耦合器件的方法
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申请号： US852562申请日： 1997-05-07
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公开(公告)号： US5877040A公开(公告)日： 1999-03-02
- 发明人: Chul Ho Park , Kwang Bok Song
- 申请人： Chul Ho Park , Kwang Bok Song
- 申请人地址： KRX Chungcheongbuk-do
- 专利权人： LG Semicon Co., Ltd.
- 当前专利权人： LG Semicon Co., Ltd.
- 当前专利权人地址： KRX Chungcheongbuk-do
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232 ; H01L31/0352 ; H01L31/113 ; H01L21/339
摘要：
A CCD and manufacturing method thereof is disclosed including: a first conductivity-type substrate having a convex portion; a first conductivity-type charge transmission domain formed on the substrate excluding the convex portion; a light detecting domain formed on the convex portion of the substrate and having a convex top surface; a second conductivity-type high-concentration impurity area formed on the top surface of the light detecting domain; a gate insulating layer formed on the substrate excluding the light detecting domain; a transmission gate formed on the gate insulating layer; a planarization layer formed on the substrate including the transmission gate; and a microlens formed on the planarization layer above a photodiode.
公开/授权文献
- US5320387A Printable coplanar laminates and method of making same 公开/授权日：1994-06-14