发明授权
- 专利标题： Apparatus and method for screening using electrostatic adhesion
- 专利标题（中）： 使用静电粘附进行筛选的装置和方法
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申请号： US703828申请日： 1996-08-27
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公开(公告)号： US5891543A公开(公告)日： 1999-04-06
- 发明人: Jon Alfred Casey , Cynthia Jeane Calli , Darren T. Cook , David B. Goland , John Ulrich Knickerbocker , Mark Joseph LaPlante , David Clifford Long , Daniel Scott Mackin , Kathleen Mary McGuire , Keith Colin O'Neil , Kevin Michael Prettyman , Michael Thomas Puchalski , Joseph Christopher Saltarelli , Candace Anne Sullivan
- 申请人： Jon Alfred Casey , Cynthia Jeane Calli , Darren T. Cook , David B. Goland , John Ulrich Knickerbocker , Mark Joseph LaPlante , David Clifford Long , Daniel Scott Mackin , Kathleen Mary McGuire , Keith Colin O'Neil , Kevin Michael Prettyman , Michael Thomas Puchalski , Joseph Christopher Saltarelli , Candace Anne Sullivan
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： H01L21/48
- IPC分类号： H01L21/48 ; H01L21/683 ; H05K1/03 ; H05K3/40 ; B32B3/02
摘要：
The present invention relates generally to a new apparatus and method for screening using electrostatic adhesion. More particularly, the invention encompasses an apparatus that uses an electrostatic charge during the screening process for a semiconductor substrate. Basically, a backing layer is adhered to a green ceramic sheet using an electrostatic charge, while the green ceramic sheet is processed.
公开/授权文献
- US5136776A Electronic part mounting apparatus 公开/授权日：1992-08-11
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