公开(公告)号：US5891543A

公开(公告)日：1999-04-06

申请号：US703828

申请日：1996-08-27

申请人： Jon Alfred Casey ,  Cynthia Jeane Calli ,  Darren T. Cook ,  David B. Goland ,  John Ulrich Knickerbocker ,  Mark Joseph LaPlante ,  David Clifford Long ,  Daniel Scott Mackin ,  Kathleen Mary McGuire ,  Keith Colin O'Neil ,  Kevin Michael Prettyman ,  Michael Thomas Puchalski ,  Joseph Christopher Saltarelli ,  Candace Anne Sullivan

发明人： Jon Alfred Casey ,  Cynthia Jeane Calli ,  Darren T. Cook ,  David B. Goland ,  John Ulrich Knickerbocker ,  Mark Joseph LaPlante ,  David Clifford Long ,  Daniel Scott Mackin ,  Kathleen Mary McGuire ,  Keith Colin O'Neil ,  Kevin Michael Prettyman ,  Michael Thomas Puchalski ,  Joseph Christopher Saltarelli ,  Candace Anne Sullivan

IPC分类号： H01L21/48 ,  H01L21/683 ,  H05K1/03 ,  H05K3/40 ,  B32B3/02

CPC分类号： H05K3/4061 ,  H01L21/4867 ,  H01L21/6833 ,  H05K1/0306 ,  H05K2203/105 ,  Y10T156/1056 ,  Y10T156/1158 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49139 ,  Y10T428/239 ,  Y10T428/31 ,  Y10T428/31786

摘要： The present invention relates generally to a new apparatus and method for screening using electrostatic adhesion. More particularly, the invention encompasses an apparatus that uses an electrostatic charge during the screening process for a semiconductor substrate. Basically, a backing layer is adhered to a green ceramic sheet using an electrostatic charge, while the green ceramic sheet is processed.

摘要翻译： 本发明一般涉及使用静电粘附进行筛选的新装置和方法。 更具体地，本发明包括在半导体衬底的筛选过程中使用静电电荷的装置。 基本上，使用静电荷将背衬层附着在生坯陶瓷片上，同时处理生坯陶瓷片。

公开(公告)号：US5759669A

公开(公告)日：1998-06-02

申请号：US577179

申请日：1995-12-22

申请人： Jon Alfred Casey ,  Cynthia Jeane Calli ,  Darren T. Cook ,  David B. Goland ,  John Ulrich Knickerbocker ,  Mark Joseph LaPlante ,  David Clifford Long ,  Daniel Scott Mackin ,  Kathleen Mary McGuire ,  Keith Colin O'Neil ,  Kevin Michael Prettyman ,  Michael Thomas Puchalski ,  Joseph Christopher Saltarelli ,  Candace Anne Sullivan

发明人： Jon Alfred Casey ,  Cynthia Jeane Calli ,  Darren T. Cook ,  David B. Goland ,  John Ulrich Knickerbocker ,  Mark Joseph LaPlante ,  David Clifford Long ,  Daniel Scott Mackin ,  Kathleen Mary McGuire ,  Keith Colin O'Neil ,  Kevin Michael Prettyman ,  Michael Thomas Puchalski ,  Joseph Christopher Saltarelli ,  Candace Anne Sullivan

IPC分类号： B32B3/08 ,  B32B3/26 ,  B32B15/02 ,  H05K1/03 ,  H05K3/40 ,  B29C37/00 ,  B32B3/24

CPC分类号： B32B15/02 ,  B32B3/08 ,  B32B3/26 ,  H05K3/4061 ,  H05K1/0306 ,  H05K2203/0156 ,  H05K2203/082 ,  Y10S428/901 ,  Y10T29/49163 ,  Y10T428/24273 ,  Y10T428/24322 ,  Y10T428/24331 ,  Y10T428/24339 ,  Y10T428/24802

摘要： The present invention relates generally to a new apparatus and method for screening using porous backing material. More particularly, the invention encompasses an apparatus that uses a porous backing material which is adhered to a green sheet during the screening process. Basically, a backing layer having a very high porosity is adhered to a green sheet, while the green sheet is screened. During the drying process of the green sheet some of the screening fluids are absorbed by the porous backing layer, which allows the screened vias of the green sheet to have a smooth surface.

摘要翻译： 本发明一般涉及使用多孔背衬材料进行筛选的新装置和方法。 更具体地说，本发明包括使用在筛选过程中粘附到生片上的多孔背衬材料的装置。 基本上，具有非常高的孔隙率的背衬层粘附到生片上，同时筛分生片。 在生片的干燥过程中，一些筛选液被多孔背衬层吸收，这允许生片的筛选通孔具有光滑的表面。