Invention Grant
US5914219A Radiation-sensitive mixture and the production of relief structures
having improved contrast
失效
辐射敏感的混合物和具有改善的对比度的浮雕结构的生产
- Patent Title: Radiation-sensitive mixture and the production of relief structures having improved contrast
- Patent Title (中): 辐射敏感的混合物和具有改善的对比度的浮雕结构的生产
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Application No.: US735114Application Date: 1996-10-22
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Publication No.: US5914219APublication Date: 1999-06-22
- Inventor: Dirk Funhoff , Reinhold Schwalm , Horst Binder
- Applicant: Dirk Funhoff , Reinhold Schwalm , Horst Binder
- Applicant Address: DEX Ludwigshafen
- Assignee: BASF Aktiengesellschaft
- Current Assignee: BASF Aktiengesellschaft
- Current Assignee Address: DEX Ludwigshafen
- Priority: DEX4306069 19930301
- Main IPC: C08K5/375
- IPC: C08K5/375 ; C08K5/42 ; C09D125/02 ; C09D125/18 ; C09D143/04 ; G03F7/004 ; G03F7/029 ; G03F7/032 ; G03F7/039 ; H01L21/027 ; G03F7/38 ; G03F7/40
Abstract:
Positive-working radiation-sensitive mixtures, essentially consisting of(a1) a water-insoluble organic binder which contains acid-labile groups and is rendered soluble in aqueous alkaline solutions by the action of an acid, or(a2.1) a polymeric binder which is insoluble in water but soluble in aqueous alkaline solutions and(a2.2) an organic compound whose solubility in an aqueous alkaline developer is increased by the action of an acid, and(b) an organic compound which produces an acid under the action of actinic radiation, which additionally contain(c) a strongly basic organic compound having hydroxide, alkoxide or phenoxide anions, are suitable for the production of relief structures having improved contrast.
Public/Granted literature
- US4667141A Coin or token operated portable car starter Public/Granted day:1987-05-19
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