Invention Grant
- Patent Title: Method of producing recrystallized-material-member, and apparatus and heating method therefor
- Patent Title (中): 生产再结晶材料部件的方法及其装置及加热方法
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Application No.: US782918Application Date: 1997-01-13
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Publication No.: US5932003APublication Date: 1999-08-03
- Inventor: Hideo Naomoto , Akihiro Takami , Takashi Ishihara , Takashi Ito , Takatoshi Chiba , Eiichi Tamaki
- Applicant: Hideo Naomoto , Akihiro Takami , Takashi Ishihara , Takashi Ito , Takatoshi Chiba , Eiichi Tamaki
- Applicant Address: JPX Tokyo JPX Kyoto
- Assignee: Mitsubishi Denki Kabushiki Kaisha,Dainippon Screen Mfg. Co., Ltd.
- Current Assignee: Mitsubishi Denki Kabushiki Kaisha,Dainippon Screen Mfg. Co., Ltd.
- Current Assignee Address: JPX Tokyo JPX Kyoto
- Priority: JPX8-046408 19960304
- Main IPC: C30B13/30
- IPC: C30B13/30 ; C30B13/22 ; C30B29/02 ; C30B29/06 ; H01L21/02 ; H01L21/20 ; H01L21/268 ; H01L27/12 ; C30B15/26
Abstract:
The present invention relates to a method of producing a recrystallized-material-member by melting a given zone of a crystalline-material-member and moving the molten zone continuously along the crystalline-material-member to recrystallize a desired region of the crystalline-material-member, wherein dimension of the molten zone of the crystalline-material-member is controlled to be constant and/or quality of crystal of the recrystallized-material-member is controlled to be uniform.
Public/Granted literature
- US5116734A Highly sensitive method for detecting peroxidase Public/Granted day:1992-05-26
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