发明授权
- 专利标题： Method of producing recrystallized-material-member, and apparatus and heating method therefor
- 专利标题（中）： 生产再结晶材料部件的方法及其装置及加热方法
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申请号： US782918申请日： 1997-01-13
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公开(公告)号： US5932003A公开(公告)日： 1999-08-03
- 发明人: Hideo Naomoto , Akihiro Takami , Takashi Ishihara , Takashi Ito , Takatoshi Chiba , Eiichi Tamaki
- 申请人： Hideo Naomoto , Akihiro Takami , Takashi Ishihara , Takashi Ito , Takatoshi Chiba , Eiichi Tamaki
- 申请人地址： JPX Tokyo JPX Kyoto
- 专利权人： Mitsubishi Denki Kabushiki Kaisha,Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人： Mitsubishi Denki Kabushiki Kaisha,Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人地址： JPX Tokyo JPX Kyoto
- 优先权： JPX8-046408 19960304
- 主分类号： C30B13/30
- IPC分类号： C30B13/30 ; C30B13/22 ; C30B29/02 ; C30B29/06 ; H01L21/02 ; H01L21/20 ; H01L21/268 ; H01L27/12 ; C30B15/26
摘要：
The present invention relates to a method of producing a recrystallized-material-member by melting a given zone of a crystalline-material-member and moving the molten zone continuously along the crystalline-material-member to recrystallize a desired region of the crystalline-material-member, wherein dimension of the molten zone of the crystalline-material-member is controlled to be constant and/or quality of crystal of the recrystallized-material-member is controlled to be uniform.
公开/授权文献
- US5116734A Highly sensitive method for detecting peroxidase 公开/授权日：1992-05-26