发明授权
US5932004A Semiconductor laser device having clad and contact layers respectively doped with MG and method for fabricating the same 失效
具有分别掺有MG的包层和接触层的半导体激光器件及其制造方法

Semiconductor laser device having clad and contact layers respectively
doped with MG and method for fabricating the same
摘要:
A semiconductor laser device having high performance, low operating voltage, and long service life, and a method for fabricating the same are provided. A semiconductor multilayer film including an active layer for use of laser beam oscillation is stacked on a substrate. Then a clad layer composed of p-type AlGaAs doped with a p-type impurity Mg, and a contact layer composed of p-type GaAs doped also with Mg are grown by an LPE growth process, and further a surface layer having a high-resistance portion present in the contact layer and low in carrier concentration is removed. The active layer for use of laser beam oscillation is arranged in a substantially center of an end surface from which the laser beam is emitted.
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