发明授权
- 专利标题： VCR head drum coated with diamond-like hard carbon films and the method and apparatus for manufacturing the same
- 专利标题（中）： 涂有金刚石状硬质碳膜的VCR磁头鼓及其制造方法和装置
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申请号： US816810申请日： 1997-03-19
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公开(公告)号： US5938838A公开(公告)日： 1999-08-17
- 发明人: Kwang-Ryeol Lee , Kwang-Yong Eun , Keun-Mo Kim
- 申请人： Kwang-Ryeol Lee , Kwang-Yong Eun , Keun-Mo Kim
- 申请人地址： KRX Seoul
- 专利权人： Korea Institute of Science and Technology
- 当前专利权人： Korea Institute of Science and Technology
- 当前专利权人地址： KRX Seoul
- 优先权： KRX94-18059 19940726
- 主分类号： G11B5/53
- IPC分类号： G11B5/53 ; B81C99/00 ; C23C16/26 ; C23C16/27 ; C23C16/458 ; C23C16/50 ; C23C16/509 ; G11B15/18 ; G11B15/61 ; G11B15/62 ; G11B23/50 ; C30B29/02
摘要：
A head drum is coated with double films, each having different characteristics, by forming a first diamond-like hard carbon film of high degree of hardness and then forming a second diamond-like hard carbon film of a lower degree of hardness thereon. The degree of hardness of the second film is lower than that of the first film. The double coating is performed by means of a synthesizing apparatus which comprises a reactor consisting of a power supply electrode, a workpiece support and and an annular ground electrode spaced from the stacked head drums by a predetermined distance.
公开/授权文献
- US5243996A Small-diameter superelastic wire guide 公开/授权日：1993-09-14
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