Invention Grant
US5960282A Method for fabricating a dynamic random access memory with a vertical
pass transistor
失效
用垂直传输晶体管制造动态随机存取存储器的方法
- Patent Title: Method for fabricating a dynamic random access memory with a vertical pass transistor
- Patent Title (中): 用垂直传输晶体管制造动态随机存取存储器的方法
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Application No.: US206065Application Date: 1998-12-04
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Publication No.: US5960282APublication Date: 1999-09-28
- Inventor: Shu-Ya Chuang
- Applicant: Shu-Ya Chuang
- Applicant Address: TWX Hsinchu
- Assignee: United Semiconductor Corp.
- Current Assignee: United Semiconductor Corp.
- Current Assignee Address: TWX Hsinchu
- Main IPC: H01L21/8242
- IPC: H01L21/8242 ; H01L27/108
Abstract:
A method for fabricating a DRAM cell with a vertical pass transistor is provided. The method of the invention includes sequentially forming a drain region, a gate structure, a source region, and a capacitor on a semiconductor substrate in a vertical distribution so that an area used by the drain region is the total area used by the DRAM cell on the substrate. In other world, the gate structure, the source region, and the capacitor are formed above the semiconductor substrate without direct contact.
Public/Granted literature
- US5442582A Transversal filter allrate equalizer for use at intermediate frequency Public/Granted day:1995-08-15
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