Invention Grant
US5977696A Field emission electron gun capable of minimizing nonuniform influence of surrounding electric potential condition on electrons emitted from emitters 失效
场发射电子枪能够最小化周围电位条件对从发射体发射的电子的不均匀影响

  • Patent Title: Field emission electron gun capable of minimizing nonuniform influence of surrounding electric potential condition on electrons emitted from emitters
  • Patent Title (中): 场发射电子枪能够最小化周围电位条件对从发射体发射的电子的不均匀影响
  • Application No.: US848463
    Application Date: 1997-05-08
  • Publication No.: US5977696A
    Publication Date: 1999-11-02
  • Inventor: Akihiko Okamoto
  • Applicant: Akihiko Okamoto
  • Applicant Address: JPX Tokyo
  • Assignee: NEC Corporation
  • Current Assignee: NEC Corporation
  • Current Assignee Address: JPX Tokyo
  • Priority: JPX8-115040 19960509
  • Main IPC: H01J3/18
  • IPC: H01J3/18 H01J1/304 H01J3/02 H01J1/02
Field emission electron gun capable of minimizing nonuniform influence
of surrounding electric potential condition on electrons emitted from
emitters
Abstract:
In a field emission electron gun including emitters (104) on predetermined parts of a substrate (109), an insulator film (105) on a remaining part of the substrate, a first gate electrode (101) on the insulator film so as to surround the emitters with a space left between each emitter and the first gate electrode and to have an outer peripheral surface defining an emission region (E), a gate edge portion (106) of a conductor is formed on the insulator film to surround the outer peripheral surface of the first gate electrode in contact with the outer peripheral surface of the first gate electrode. A second gate electrode (102) is formed on the insulator film to surround the gate edge portion with a distance left between the gate edge portion and the second gate electrode applied with a second voltage less than a first voltage applied to the first gate electrode.
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