发明授权
US5977715A Handheld atmospheric pressure glow discharge plasma source 失效
手持式大气压辉光放电等离子体源

Handheld atmospheric pressure glow discharge plasma source
摘要:
A handheld atmospheric pressure glow discharge plasma source is provided without the use of an arc. The plasma is induced using a radio frequency signal. An LC resonator in the handheld source with a gain of about 10 at 13.56 MHZ improves the power transfer from a power supply and tuner to the plasma chamber which is capable of producing stable plasmas in Ar, He and O.sub.2 mixtures.
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