发明授权
- 专利标题: Handheld atmospheric pressure glow discharge plasma source
- 专利标题(中): 手持式大气压辉光放电等离子体源
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申请号: US572390申请日: 1995-12-14
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公开(公告)号: US5977715A公开(公告)日: 1999-11-02
- 发明人: Kin Li , Minas Tanielian
- 申请人: Kin Li , Minas Tanielian
- 申请人地址: WA Seattle
- 专利权人: The Boeing Company
- 当前专利权人: The Boeing Company
- 当前专利权人地址: WA Seattle
- 主分类号: H05B41/28
- IPC分类号: H05B41/28 ; H05H1/24 ; H05H1/54 ; H05B31/26
摘要:
A handheld atmospheric pressure glow discharge plasma source is provided without the use of an arc. The plasma is induced using a radio frequency signal. An LC resonator in the handheld source with a gain of about 10 at 13.56 MHZ improves the power transfer from a power supply and tuner to the plasma chamber which is capable of producing stable plasmas in Ar, He and O.sub.2 mixtures.
公开/授权文献
- US5064060A Kit for holding caps onto containers 公开/授权日:1991-11-12
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