Invention Grant
- Patent Title: Correction device for correcting chromatic aberration in particle-optical apparatus
- Patent Title (中): 用于校正颗粒光学装置中的色差的校正装置
-
Application No.: US932981Application Date: 1997-09-18
-
Publication No.: US5986269APublication Date: 1999-11-16
- Inventor: Marcellinus P. C. M. Krijn , Alexander Henstra , Karel D. van der Mast
- Applicant: Marcellinus P. C. M. Krijn , Alexander Henstra , Karel D. van der Mast
- Applicant Address: NY New York
- Assignee: U.S. Philips Corporation
- Current Assignee: U.S. Philips Corporation
- Current Assignee Address: NY New York
- Priority: NLX96202638 19960920
- Main IPC: H01J37/153
- IPC: H01J37/153 ; H01J37/10 ; H01J37/145
Abstract:
Particle-optical rotationally symmetrical lenses inevitably have chromatic aberration. This lens fault determines the limit of the resolution of known particle-optical apparatus at a comparatively low acceleration voltage (0.5 kV to 5 kV) of the particle beam. This lens fault cannot be eliminated by compensation by means of rotationally symmetrical fields. In order to enhance the resolution of the particle-optical apparatus nevertheless, it has already been proposed to mitigate said lens fault by means of a Wien type corrector. Such a known configuration is provided with a number of electrical and magnetic multipoles. In order to achieve easier adjustment of the various multipole fields, the pole faces (30-i) governing the multipole fields according to the invention have a specific length L=(2.pi..sup.2 n.sup.2)/(K.sub.obj.sup.2 C.sub.c,obj), in which K.sub.obj is the strength of the focusing lens to be corrected and C.sub.c,obj is the coefficient of chromatic aberration of this lens.
Public/Granted literature
- US5351344A Fluid evacuation system Public/Granted day:1994-10-04
Information query