发明授权
US5994698A Microprobe, preparation thereof and electronic device by use of said
microprobe
失效
微探针，其制备和使用所述微探针的电子装置
- 专利标题： Microprobe, preparation thereof and electronic device by use of said microprobe
- 专利标题（中）： 微探针，其制备和使用所述微探针的电子装置
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申请号： US240216申请日： 1994-05-09
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公开(公告)号： US5994698A公开(公告)日： 1999-11-30
- 发明人: Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
- 申请人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX62-237499 19870924; JPX62-237500 19870924; JPX62-318951 19871218; JPX62-221403 19880906; JPX63-222232 19880907; JPX63-226420 19880912
- 主分类号： G01Q70/14
- IPC分类号： G01Q70/14 ; G01Q60/16 ; G01Q70/10 ; G01Q80/00 ; H01J37/28
摘要：
A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.
公开/授权文献
- US4969257A Transfer sheet and process for making a circuit substrate 公开/授权日：1990-11-13
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