发明授权
- 专利标题： Planar technology for producing light-emitting devices
- 专利标题（中）： 平面技术生产发光器件
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申请号： US231689申请日： 1999-01-14
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公开(公告)号： US5998232A公开(公告)日： 1999-12-07
- 发明人: H. Paul Maruska
- 申请人： H. Paul Maruska
- 申请人地址： MA Wakefield
- 专利权人： Implant Sciences Corporation
- 当前专利权人： Implant Sciences Corporation
- 当前专利权人地址： MA Wakefield
- 主分类号： H01L33/32
- IPC分类号： H01L33/32 ; H01S5/02 ; H01S5/022 ; H01S5/323 ; H01S5/42 ; H01L21/00
摘要：
The present invention relates to a novel planar technology approach utilizing ion implantation to improve the fabrication procedure for manufacturing nitride light-emitting and laser diodes. The simplified processing significantly reduces the costs of manufacturing these devices and allows flip-chip bonding to be used for efficient heat removal, yielding much brighter LEDs and more powerful lasers.
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