发明授权
US6034374A Thermal infrared sensors, imaging devices, and manufacturing methods for
such sensors
失效
热红外传感器,成像装置和这种传感器的制造方法
- 专利标题: Thermal infrared sensors, imaging devices, and manufacturing methods for such sensors
- 专利标题(中): 热红外传感器,成像装置和这种传感器的制造方法
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申请号: US967532申请日: 1997-11-10
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公开(公告)号: US6034374A公开(公告)日: 2000-03-07
- 发明人: Mitsuteru Kimura , Kenji Udagawa
- 申请人: Mitsuteru Kimura , Kenji Udagawa
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-296494 19961108; JPX9-242675 19970908
- 主分类号: G01J1/02
- IPC分类号: G01J1/02 ; G01J5/02 ; G01J5/20 ; H01L37/02 ; H01L27/144
摘要:
Thermal infrared sensors are disclosed for the detection of an incident infrared flux. The sensors include an absorber each including an absorption layer and a thermal sensing element. The incident infrared flux is absorbed by the absorption layer. Heat generated by the absorption is detected by the thermal sensing element such as a thermistor. The absorber is supported above a substrate by supports and bridges, reducing heat transfer from the absorber to the substrate. The supports and bridges include electrical connections to the absorber and the substrate. The supports and bridges are located beneath the absorber so that a large proportion of the area of the absorber is available to absorb the incident flux. Imaging devices including arrays of such sensors and fabrication methods for the sensors and imaging devices are also disclosed.
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