发明授权
- 专利标题： Gas discharge laser with gas temperature control
- 专利标题（中）： 气体放电激光器采用气体温度控制
-
申请号： US310872申请日： 1999-05-12
-
公开(公告)号： US6034978A公开(公告)日： 2000-03-07
- 发明人: Richard C. Ujazdowski , Robert A. Shannon , Dmitry Berger , William N. Partlo , Tom A. Watson , Paul S. Thompson , Toshihiko Ishihara , Carl E. Tedesco, II , Donald G. Larson , Steven M. Harrington , Richard G. Morton , James H. Azzola , I. Roger Oliver , Thomas P. Duffey , Igor V. Fomenkov
- 申请人： Richard C. Ujazdowski , Robert A. Shannon , Dmitry Berger , William N. Partlo , Tom A. Watson , Paul S. Thompson , Toshihiko Ishihara , Carl E. Tedesco, II , Donald G. Larson , Steven M. Harrington , Richard G. Morton , James H. Azzola , I. Roger Oliver , Thomas P. Duffey , Igor V. Fomenkov
- 申请人地址： CA San Diego
- 专利权人： Cymer, Inc.
- 当前专利权人： Cymer, Inc.
- 当前专利权人地址： CA San Diego
- 主分类号： H01S3/225
- IPC分类号： H01S3/225 ; G03F7/20 ; H01S3/036 ; H01S3/041 ; H01S3/134 ; H01S3/04
摘要：
A gas discharge laser with fast response gas temperature control to maintain laser gas temperature within desired limits during burst mode operation. Preferred embodiments include a passive temperature stabilizer having fins with surface areas exposed to flowing laser gas at least equal to the surface area of the cooling fins of a laser gas heat exchanger. Preferred embodiments utilize heating elements and coolant flow control to regulate laser gas temperatures using processors programmed to anticipate idle periods.
公开/授权文献
- US5500713A Color printer for printing photographs 公开/授权日：1996-03-19
信息查询
