摘要:
The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2 injection controls with novel learning algorithm.
摘要:
The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2 injection controls with novel learning algorithm.
摘要:
The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2 injection controls with novel learning algorithm.
摘要:
A very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. A prior art burst mode "slug effect" occuring at one gas circulation time after the beginning of a burst of pulses is eliminated by the addition of a minute quantity of oxygen. In a preferred embodiment very narrow bandwidth is achieved by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line narrowing module were replaced with calcium fluoride prisms.
摘要:
According to the invention, there is provided a continuous web printing apparatus comprising transport means including an endless belt having a sticky surface, a plurality of support rollers having said endless belt entrained therearound and a drive means for rotating said support rollers to move said endless belt, a press means for pressing a continuous web, such as a fabric or transfer sheet, against said endless belt to stick said continuous web to said endless belt, an ink jet head disposed between said support rollers in opposed relation to the surface of said continuous web stuck to said endless belt, an abutment adapted to abut against said endless belt, said abutment being opposed to said ink jet head with the continuous web and said endless belt interposed therebetween, head gap adjusting means for moving at least either of said ink jet head or said abutment in a direction in which the two are opposed to each other, and recovering means for peeling said continuous web, which has passed by said ink jet head, from said endless belt for recovery.
摘要:
An apparatus and method which may comprise a seed laser defining an optical cavity producing an output. An amplifier may amplify the seed laser output. A bandwidth error signal generator may provide a bandwidth error signal from measured bandwidth and a target. A bandwidth selection element, which may comprise an adjustable sized aperture external to the cavity of the seed laser may selectively alter the bandwidth of the seed laser output. A bandwidth control system may control the bandwidth control element and also selectively adjust a differential firing time between the seed laser and amplifier or another bandwidth selection actuator to cooperated (coarsely or finely) with the bandwidth selection element to control bandwidth of the laser system.
摘要:
A printed cloth in which a dye is deposited in dots on the cloth to form a desired printed pattern. Said dot deposition is formed in a length of 0.05 to 0.3 mm to the longitudinal direction of the fiber in single fiber unit of the yarn constituting said cloth. A fine printed pattern is deposited clearly in good reproducibility. The printed pattern can be formed by using the dyes of the three primary colors or of the three primary colors and black color. It is preferred that Dyes I , II and III having a perceived chromaticity index (a) and (b) defined in the color range [CIE 1976 (L, a, b) space] on the cloth within the following range are used as said dyes of three primary colors and DyeIV is used as said black dye. I Yellow: (a) −20˜0 (b) 50˜90 II Red: (a) 50˜70 (b) 0˜20 III Blue: (a) −50˜−1 (b) −50˜−20 IV Black: (a) −6˜6 (b) −6˜6 Such a printed cloth can be prepared by a procedure in which a printing ink is deposited in dots on the surface of a cloth by using a dye spraying device having a nozzle of 80 dots/mm or more and controlled based on the image signal.
摘要:
The present invention provides a very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. Very small quantities of a stablizing additive consisting of oxygen or a heavy noble gas (xenon or radon for KrF lasers, or krypton, xenon or radon for ArF lasers), are added to the gas mixture. Tests performed show substantial improvements in energy stability with the addition of about 30 ppm of xenon to a KrF laser. Tests show improved performance for the ArF lasers with the addition of about 6-10 ppm of Xe or 40 ppm of Kr. In a preferred embodiment very narrow bandwidth is achieved on a KrF laser by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line-narrowing module were replaced with calcium fluoride prisms.
摘要:
The present invention provides a very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. Very small quantities of a stablizing additive consisting of oxygen or a heavy noble gas (xenon or radon for KrF lasers, or krypton, xenon or radon for ArF lasers), are added to the gas mixture. Tests performed show substantial improvements in energy stability with the addition of about 30 ppm of xenon to a KrF laser. Tests show improved performance for the ArF lasers with the addition of about 6-10 ppm of Xe or 40 ppm of Kr. In a preferred embodiment very narrow bandwidth is achieved on a KrF laser by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line-narrowing module were replaced with calcium fluoride prisms.
摘要:
An apparatus and method which may comprise a seed laser defining an optical cavity producing an output. An amplifier may amplify the seed laser output. A bandwidth error signal generator may provide a bandwidth error signal from measured bandwidth and a target. A bandwidth selection element, which may comprise an adjustable sized aperture external to the cavity of the seed laser may selectively alter the bandwidth of the seed laser output. A bandwidth control system may control the bandwidth control element and also selectively adjust a differential firing time between the seed laser and amplifier or another bandwidth selection actuator to cooperated (coarsely or finely) with the bandwidth selection element to control bandwidth of the laser system.