发明授权
- 专利标题: Tangential fan with cutoff assembly and vibration control for electric discharge laser
- 专利标题(中): 切向风扇切割组件和放电激光器的振动控制
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申请号: US310786申请日: 1999-05-12
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公开(公告)号: US6034984A公开(公告)日: 2000-03-07
- 发明人: Thomas Hofmann , James K. Howey , Robert A. Shannon , Richard C. Ujazdowski , Tom A. Watson , R. Kyle Webb
- 申请人: Thomas Hofmann , James K. Howey , Robert A. Shannon , Richard C. Ujazdowski , Tom A. Watson , R. Kyle Webb
- 申请人地址: CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: CA San Diego
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; H01S3/036 ; H01S3/225 ; H01S3/22
摘要:
A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.
公开/授权文献
- US5515684A Resonant macrosonic synthesis 公开/授权日:1996-05-14
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