公开(公告)号：US6034984A

公开(公告)日：2000-03-07

申请号：US310786

申请日：1999-05-12

申请人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

发明人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

IPC分类号： G03F7/20 ,  H01S3/036 ,  H01S3/225 ,  H01S3/22

CPC分类号： H01S3/036 ,  G03F7/708 ,  H01S3/225

摘要： A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.

摘要翻译： 用于再循环激光气体混合物的切向风扇和切割组件具有叶片构件，其周向位置从端到端逐渐变化，和/或锥形阳极组件。 刀片构件的数量可以在端部之间是恒定的或可变的。 叶片构件的圆周位置可以在端部之间单调或可逆地移动。 叶片构件通过最佳地选择轮毂构件的数量和布置来控制风扇的固有振动频率而变硬。 形成切向风扇的方法包括从固体块铸造和加工。 通常可以通过电子束焊接来连接整体结构。 铸造，焊接和加工过程不会引起额外的污染物。 生产的切向风扇具有机械刚度，精度公差和污染物浓度低。 叶片构件可以形成为空气箔形状。

公开(公告)号：US6144686A

公开(公告)日：2000-11-07

申请号：US400026

申请日：1999-09-21

申请人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

发明人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb

IPC分类号： F16F15/10 ,  G03F7/20 ,  H01S3/036 ,  H01S3/223 ,  H01S3/225 ,  H01S3/22

CPC分类号： G03F7/708 ,  H01S3/036 ,  H01S3/225

摘要： A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.

公开(公告)号：US06914919B2

公开(公告)日：2005-07-05

申请号：US10187336

申请日：2002-06-28

申请人： Tom A. Watson ,  Richard C. Ujazdowski ,  Alex P. Ivaschenko ,  Richard L. Sandstrom ,  Robert A. Shannon ,  R. Kyle Webb ,  Frederick A. Palenschat ,  Thomas Hofmann ,  Curtis L. Rettig ,  Richard M. Ness ,  Paul C. Melcher ,  Alexander I. Ershov

发明人： Tom A. Watson ,  Richard C. Ujazdowski ,  Alex P. Ivaschenko ,  Richard L. Sandstrom ,  Robert A. Shannon ,  R. Kyle Webb ,  Frederick A. Palenschat ,  Thomas Hofmann ,  Curtis L. Rettig ,  Richard M. Ness ,  Paul C. Melcher ,  Alexander I. Ershov

IPC分类号： H01S3/134 ,  G03F7/20 ,  H01S3/00 ,  H01S3/036 ,  H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/08 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/102 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/11 ,  H01S3/13 ,  H01S3/131 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225 ,  H01S3/23 ,  H01S3/10

CPC分类号： H01S3/0385 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0387 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

摘要： The present invention provides gas discharge laser systems capable of reliable long-term operation in a production line capacity at repetition rates in the range of 6,000 to 10,0000 pulses power second. Preferred embodiments are configured as KrF, ArF and F2 lasers used for light sources for integrated circuit lithography. Improvements include a modified high voltage power supply capable for charging an initial capacitor of a magnetic compression pulse power system to precise target voltages 6,000 to 10,0000 times per second and a feedback control for monitoring pulse energy and determining the target voltages on a pulse-by-pulse basis. Several techniques are disclosed for removing discharge created debris from the discharge region between the laser electrodes during the intervals between discharges. In one embodiment the width of the discharge region is reduced from about 3 mm to about 1 mm so that a gas circulation system designed for 4,000 Hz operation could be utilized for 10,000 Hz operation. In other embodiments the gas flow between the electrodes is increased sufficiently to permit 10,000 Hz operation with a discharge region width of 3 mm. To provide these substantial increased gas flow rates, Applicants have disclosed preferred embodiments utilize tangential forms of the prior art but with improved and more powerful motors and novel bearing designs. New bearing designs include both ceramic bearings and magnetic bearings. In other embodiments, some or all of the gas circulation power is provided with a blower located outside the laser chamber. The outside blower can be located in the laser cabinet or in separate location.

摘要翻译： 本发明提供一种气体放电激光系统，其能够以6,000至1000000次脉冲功率秒的重复频率在生产线容量中可靠地长期运行。 优选的实施例被配置为用于集成电路光刻的光源的KrF，ArF和F 2 N 2激光器。 改进包括一种改进的高压电源，其能够将磁压缩脉冲电源系统的初始电容器充电至每秒精确的目标电压6,000至10,0000次，以及用于监视脉冲能量的反馈控制以及确定脉冲 - 逐脉冲基础。 公开了用于在放电间隔期间从激光电极之间的放电区域去除产生的碎屑的几种技术。 在一个实施例中，放电区域的宽度从约3mm减小至约1mm，使得设计用于4000Hz操作的气体循环系统可用于10,000Hz操作。 在其他实施例中，电极之间的气流充分增加，以允许10,000Hz的操作，放电区域宽度为3mm。 为了提供这些显着增加的气体流速，申请人已经公开了使用现有技术的切向形式的优选实施例，但是具有改进的和更强大的电动机和新颖的轴承设计。 新的轴承设计包括陶瓷轴承和磁性轴承。 在其他实施例中，一些或全部气体循环动力设置有位于激光室外部的鼓风机。 外部鼓风机可以位于激光柜内或分开的位置。

公开(公告)号：US6128323A

公开(公告)日：2000-10-03

申请号：US157067

申请日：1998-09-18

申请人： David W. Myers ,  Herve A. Besaucele ,  Palash P. Das ,  Thomas P. Duffey ,  Alexander I. Ershov ,  Igor V. Fomenkov ,  Thomas Hofmann ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  Robert G. Ozarski ,  Gamaralalage G. Padmabandu ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom ,  Paul S. Thompson ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb ,  Paolo Zambon

发明人： David W. Myers ,  Herve A. Besaucele ,  Palash P. Das ,  Thomas P. Duffey ,  Alexander I. Ershov ,  Igor V. Fomenkov ,  Thomas Hofmann ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  Robert G. Ozarski ,  Gamaralalage G. Padmabandu ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom ,  Paul S. Thompson ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb ,  Paolo Zambon

IPC分类号： G03F7/20 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/041 ,  H01S3/08 ,  H01S3/081 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80 ,  H01S3/00

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225 ,  H03K17/80 ,  H03K3/57 ,  H01S3/08009 ,  H01S3/0812 ,  H01S3/1392 ,  H01S3/2251 ,  H01S3/2256

摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses at 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Improvements in the laser chamber permitting the higher pulse rates and improved bandwidth performance include a single upstream preionizer tube and a high efficiency chamber. The chamber is designed for operation at lower fluorine concentration. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

摘要翻译： 本发明提供了一种可靠的模块化生产质量准分子激光器，其能够在2000Hz下产生10mJ激光脉冲，全宽度为一半，最大带宽为约0.6μm或更小。 可更换模块包括激光室; 由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。 允许更高脉冲速率和改进的带宽性能的激光室的改进包括单个上游预分解器管和高效室。 该室设计用于在较低的氟浓度下运行。 在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。 这些改进包括增加容量的高压电源，具有用于精确电压调整的电压降低电路，改进的换向模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次 具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。 用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

公开(公告)号：US6023486A

公开(公告)日：2000-02-08

申请号：US311680

申请日：1999-05-12

申请人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski

发明人： Thomas Hofmann ,  James K. Howey ,  Robert A. Shannon ,  Richard C. Ujazdowski

IPC分类号： G03F7/20 ,  H01S3/036 ,  H01S3/225 ,  H01S3/22

CPC分类号： H01S3/036 ,  G03F7/708 ,  H01S3/225

摘要： A tangential fan with cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential positions of blade members can shift monotonically or reversibly between ends. Blade members can be formed into air foil shapes and are stiffened by one or more transverse annular hub members. Processes for making tangential fans include soldering, casting, and machining from a solid block. Monolithic structures can be joined, typically by soldering or electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Soldering produces substantially silicon-free assemblies. Tangential fans produced in accordance with the invention have improved mechanical rigidity, accurate tolerances, and low contaminant concentrations.

摘要翻译： 具有用于再循环激光气体混合物的切断组件的切向风扇具有叶片构件，其从端到端逐步地沿周向位置变化，和/或锥形阳极组件。 刀片构件的数量可以在端部之间是恒定的或可变的。 叶片构件的圆周位置可以在端部之间单调地或可逆地移动。 叶片构件可以形成为空气箔形状并且被一个或多个横向环形毂构件加固。 制造切向风扇的过程包括从固体块进行焊接，铸造和加工。 通常可以通过焊接或电子束焊接来连接整体结构。 铸造，焊接和加工过程不会引起额外的污染物。 焊接产生基本无硅组件。 根据本发明生产的切向风扇具有改善的机械刚性，精确的公差和低的污染物浓度。

公开(公告)号：US06661826B2

公开(公告)日：2003-12-09

申请号：US10164885

申请日：2002-06-07

申请人： Richard C. Ujazdowski ,  Timothy S. Dyer ,  William N. Partlo ,  Michael Altheim ,  Brian Strate ,  Thomas Hofmann

发明人： Richard C. Ujazdowski ,  Timothy S. Dyer ,  William N. Partlo ,  Michael Altheim ,  Brian Strate ,  Thomas Hofmann

IPC分类号： H01S3223

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70483 ,  H01S3/036 ,  H01S3/038 ,  H01S3/225

摘要： A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece elongated electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.

公开(公告)号：US08868402B2

公开(公告)日：2014-10-21

申请号：US12650443

申请日：2009-12-30

申请人： Dmitry Korolev ,  Hartmut Maennel ,  Matthias Heiler ,  Michael Schaer ,  Thomas Hofmann ,  Wojciech Gajewski ,  Justyna Sidorska

发明人： Dmitry Korolev ,  Hartmut Maennel ,  Matthias Heiler ,  Michael Schaer ,  Thomas Hofmann ,  Wojciech Gajewski ,  Justyna Sidorska

IPC分类号： G06F17/30 ,  G06F15/00

CPC分类号： G06F17/30 ,  G06F15/00 ,  G06F17/2785 ,  G06F17/30707 ,  G06K9/726

摘要： Methods, systems, and apparatus, including computer program products, for constructing text classifiers. The method includes receiving a collection of candidate phrases for a given topic; filtering the received candidate phrases to remove erroneously included candidate phrases; assigning weights to the candidate phrases including scoring each candidate phrase using an initial classifier and assigning weights to the candidate phrases based on the scores; and generating a linear classifier using the filtered and weighted candidate phrases, where the linear classifier varies the weights for each phrase candidate depending on the length of the document being classified.

摘要翻译： 用于构建文本分类器的方法，系统和装置，包括计算机程序产品。 该方法包括接收给定主题的候选短语集合; 过滤所接收的候选短语以去除错误地包括的候选短语; 向所述候选短语分配权重，包括使用初始分类器对每个候选短语进行评分，并且基于所述分数向所述候选短语分配权重; 以及使用经滤波和加权的候选短语生成线性分类器，其中线性分类器根据被分类的文档的长度来改变每个短语候选的权重。

公开(公告)号：US08803027B2

公开(公告)日：2014-08-12

申请号：US11805596

申请日：2007-05-23

申请人： Thomas Hofmann

发明人： Thomas Hofmann

IPC分类号： B23K26/00

CPC分类号： B23K26/03 ,  B23K26/034 ,  B23K26/0622 ,  B23K26/0665 ,  B23K26/0738 ,  B23K26/0853 ,  B23K26/40 ,  B23K2101/34 ,  B23K2101/40 ,  B23K2103/50 ,  C30B13/24 ,  C30B29/06

摘要： A thin beam laser crystallization apparatus for selectively melting a film deposited on a substrate is disclosed having a laser source producing a pulsed laser output beam, the source having an oscillator comprising a convex reflector and a piano output coupler; and an optical arrangement focusing the beam in a first axis and spatially expanding the beam in a second axis to produce a line beam for interaction with the film.

摘要翻译： 公开了一种用于选择性地熔化沉积在基板上的薄膜的薄射束激光结晶装置，其具有产生脉冲激光输出光束的激光源，该源具有包括凸反射器和钢琴输出耦合器的振荡器; 以及光学布置，将光束聚焦在第一轴线上，并且在第二轴线上空间地扩展光束以产生用于与胶片相互作用的线束。

公开(公告)号：US20140172839A1

公开(公告)日：2014-06-19

申请号：US12050065

申请日：2008-03-17

申请人： Stefan Christoph ,  Benjamin Liebald ,  Mihai Stroe ,  Thomas Hofmann

发明人： Stefan Christoph ,  Benjamin Liebald ,  Mihai Stroe ,  Thomas Hofmann

IPC分类号： G06F17/30

CPC分类号： G06F16/9566

摘要： A method of suggesting replacements for unavailable web pages is performed at a server system separate from a client system. A web page is identified. For documents in a collection of web pages, respective overlaps of content in the web page and the documents are determined based on stored information about content in the web page and the documents. One or more of the documents that have overlaps that satisfy a first criterion are selected. A request for a replacement for the web page is received from the client system and replacement web page information is provided to the client system. The replacement web page information is selected from the set consisting of A) one or more links to the one or more selected documents, B) a redirect to one of the one or more selected documents, and C) one of the one or more selected documents.

摘要翻译： 在不同于客户端系统的服务器系统上执行建议替代不可用网页的方法。 识别网页。 对于网页集合中的文档，基于存储在网页和文档中的内容的信息来确定网页中的各个内容的重叠以及文档。 选择具有满足第一标准的重叠的一个或多个文档。 从客户端系统接收到对网页的替换的请求，并将替换网页信息提供给客户端系统。 所述替换网页信息从包括A）到所述一个或多个所选文档的一个或多个链接的集合中选择，B）重定向到所述一个或多个所选文档之一，以及C）所选择的一个或多个文件中的一个 文件。

公开(公告)号：US08737438B2

公开(公告)日：2014-05-27

申请号：US13571129

申请日：2012-08-09

申请人： Palash P. Das ,  Thomas Hofmann ,  Jesse D. Davis ,  Richard L. Sandstrom

发明人： Palash P. Das ,  Thomas Hofmann ,  Jesse D. Davis ,  Richard L. Sandstrom

IPC分类号： H01S3/10

CPC分类号： B23K26/043 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/0738 ,  C30B1/023 ,  C30B13/24

摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.

摘要翻译： 公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。 该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。 在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。 在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。 在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。