发明授权
US6066240A Method and device for manufacturing a thin film and magnetic recording
medium
失效
用于制造薄膜和磁记录介质的方法和装置
- 专利标题： Method and device for manufacturing a thin film and magnetic recording medium
- 专利标题（中）： 用于制造薄膜和磁记录介质的方法和装置
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申请号： US4078申请日： 1998-01-07
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公开(公告)号： US6066240A公开(公告)日： 2000-05-23
- 发明人: Kazuyoshi Honda , Yoshiharu Maezawa , Masaru Odagiri , Sadayuki Okazaki
- 申请人： Kazuyoshi Honda , Yoshiharu Maezawa , Masaru Odagiri , Sadayuki Okazaki
- 申请人地址： JPX Osaka
- 专利权人： Matsushita Electric Industrial Co. Ltd.
- 当前专利权人： Matsushita Electric Industrial Co. Ltd.
- 当前专利权人地址： JPX Osaka
- 优先权： JPX6-194005 19940818
- 主分类号： C23C14/08
- IPC分类号： C23C14/08 ; C23C14/00 ; C23C14/56 ; G11B5/64 ; G11B5/65 ; G11B5/66 ; G11B5/85 ; G11B5/851
摘要：
A method and a device for manufacturing a thin film by a vacuum deposition method, and a magnetic recording medium produced thereby are disclosed. A thin film of high quality is mass-produced while introducing reaction gas to a thin film forming section from a nozzle consisting of minute tubes, so that the flow of evaporated atoms is not disturbed by the reaction gas.
公开/授权文献
- USD350564S Paper punch 公开/授权日：1994-09-13
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