发明授权
- 专利标题: Method of making trench DRAM
- 专利标题(中): 制造沟槽DRAM的方法
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申请号: US12070申请日: 1998-01-22
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公开(公告)号: US6066526A公开(公告)日: 2000-05-23
- 发明人: Mark Charles Hakey , William Hsioh-Lien Ma
- 申请人: Mark Charles Hakey , William Hsioh-Lien Ma
- 申请人地址: CA Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: CA Armonk
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/8242
摘要:
A process sequence for an eight square folded bit line dynamic random access memory (DRAM) cell allows a transfer device channel length of two lithographic features. The method uses conventional processing techniques with no spacer defined features and uses conventional structures. The process sequence starts with deep trench (DT) processing, followed by deposition of insulator such as SiO2, planarization and pad strip. Then gate insulator and gate conductor are deposited. Also a pad or thin insulator can be deposited at this stage. The structure is etched using a shallow trench isolation mask and filled with SiO.sub.2. The gate conductor such as polysilicon is etched with a contact mask and reactive ion etching. If not previously deposited, a thin insulator is deposited. The structure is etched again with a gate poly contact mask. A gate conductor is then deposited. After a final etch, wiring is added.
公开/授权文献
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