发明授权
- 专利标题: Method for making coatings of uniform thickness
- 专利标题(中): 制造均匀厚度涂层的方法
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申请号: US172502申请日: 1998-10-14
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公开(公告)号: US6083341A公开(公告)日: 2000-07-04
- 发明人: Chang Wei , George Theodore Dalakos
- 申请人: Chang Wei , George Theodore Dalakos
- 申请人地址: GA Marietta
- 专利权人: Lockheed Martin Corp.
- 当前专利权人: Lockheed Martin Corp.
- 当前专利权人地址: GA Marietta
- 主分类号: B05D1/04
- IPC分类号: B05D1/04 ; B05D7/24 ; C03C17/00 ; C03C17/245 ; C23C16/44 ; C23C16/455 ; C23C16/509 ; H05H1/24 ; B05D5/06 ; B32B31/14
摘要:
A method for forming coatings of constant thickness on sheets of dielectric substrate (10), which may be curved, includes the step of adhesively applying foil (12) to one side of the dielectric substrate. An electrode (16) is set at a constant distance (D) from the side (10fs) of the substrate to be coated. If the substrate is curved, the electrode is preferably also curved. The region to be coated is evacuated, gaseous precursor materials are infused into the gap, and voltage is applied between the foil (12) and the electrode (16) sufficient to ionize the precursors to a plasma state, whereupon the deposition occurs. The foil may be applied as an adhesive-backed foil. The adhesive may be electrically conductive.
公开/授权文献
- US4794606A Opto-electronic device 公开/授权日:1988-12-27