发明授权
- 专利标题： Resist removing method
- 专利标题（中）： 抗蚀剂去除方法
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申请号： US203497申请日： 1998-12-01
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公开(公告)号： US6099675A公开(公告)日： 2000-08-08
- 发明人: Masayuki Yamamoto , Makoto Namikawa , Eiji Toyoda , Shigeji Kuroda , Saburo Miyamoto , Takao Matsushita
- 申请人： Masayuki Yamamoto , Makoto Namikawa , Eiji Toyoda , Shigeji Kuroda , Saburo Miyamoto , Takao Matsushita
- 申请人地址： JPX Osaka
- 专利权人： Nitto Denko Corporation
- 当前专利权人： Nitto Denko Corporation
- 当前专利权人地址： JPX Osaka
- 优先权： JPX9-331530 19971202
- 主分类号： H01L21/027
- IPC分类号： H01L21/027 ; B29C63/00 ; B32B31/16 ; C09J5/06 ; G05G15/00 ; H01J21/30
摘要：
An adhesive tape is applied to an article covered with a resist pattern. The article with the adhesive tape applied thereto is rapidly cooled to form cracks in the resist pattern on the surface of the article to weaken the cohesion between the resist pattern and the surface of the article. After the cooling, the adhesive tape is separated from the article, whereby the resist pattern is removed with the adhesive tape from the surface of the article.
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