Invention Grant
- Patent Title: Electron emissive film and method
- Patent Title (中): 电子发射膜和方法
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Application No.: US322304Application Date: 1999-05-28
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Publication No.: US6100628APublication Date: 2000-08-08
- Inventor: Bernard F. Coll , Eric P. Menu , Albert Alec Talin
- Applicant: Bernard F. Coll , Eric P. Menu , Albert Alec Talin
- Applicant Address: IL Schaumburg
- Assignee: Motorola, Inc.
- Current Assignee: Motorola, Inc.
- Current Assignee Address: IL Schaumburg
- Main IPC: C23C14/06
- IPC: C23C14/06 ; C23C14/32 ; H01J1/304 ; H01J9/02 ; H01J29/04 ; H01J31/12 ; H01J1/05
Abstract:
A method for forming an electron emissive film (200, 730, 830) includes the steps of: (i) evaporating a graphite source (120, 620) in a cathodic arc deposition apparatus (100, 600) to create a carbon plasma (170, 670), (ii) applying a potential difference between the graphite source (120, 620) and a glass or silicon deposition substrate (130, 630, 710, 810) for accelerating the carbon plasma (170, 670) toward the deposition substrate (130, 630, 710, 810), (iii) providing a working gas within the cathodic arc deposition apparatus (100, 600), and (ii) depositing the carbon plasma (170, 670) onto the deposition substrate (130, 630, 710, 810).
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