发明授权
US6114091A Photopolymerizable composition containing an N-heterocyclic
photoinitiator
失效
含有N-杂环光引发剂的光聚合性组合物
- 专利标题: Photopolymerizable composition containing an N-heterocyclic photoinitiator
- 专利标题(中): 含有N-杂环光引发剂的光聚合性组合物
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申请号: US962781申请日: 1997-11-03
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公开(公告)号: US6114091A公开(公告)日: 2000-09-05
- 发明人: Ulrich Geissler , Hans-Dieter Frommeld , Hans Ruckert
- 申请人: Ulrich Geissler , Hans-Dieter Frommeld , Hans Ruckert
- 申请人地址: IL Chicago
- 专利权人: Morton International, Inc.
- 当前专利权人: Morton International, Inc.
- 当前专利权人地址: IL Chicago
- 优先权: DEX4027301 19900829
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C08F2/50 ; G03F7/027 ; G03F7/028 ; G03F7/031 ; G03F7/032 ; G03F7/038 ; H01L21/027 ; H05K3/06 ; G03C1/73
摘要:
A photopolymerizable composition, which contains a polymeric binder, a compound which can be polymerized by free radicals and has at least one terminal ethylenic double bond and a photoinitiator combination comprising an N-heterocyclic compound, a thioxanthone derivative and a dialkylamino compound, is highly photosensitive and produces photoresist stencils with vertical side walls.
公开/授权文献
- US4236953A Process for producing thermoplastic multi-walled pipes 公开/授权日:1980-12-02
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