发明授权
- 专利标题： Amorphously deposited metal oxide ceramic films
- 专利标题（中）： 非晶沉积金属氧化物陶瓷膜
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申请号： US107861申请日： 1998-06-30
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公开(公告)号： US6133051A公开(公告)日： 2000-10-17
- 发明人: Frank S. Hintermaier , Bryan C. Hendrix , Jeffrey F. Roeder , Debra A. Desrochers , Thomas H. Baum
- 申请人： Frank S. Hintermaier , Bryan C. Hendrix , Jeffrey F. Roeder , Debra A. Desrochers , Thomas H. Baum
- 申请人地址： CT Danbury
- 专利权人： Advanced Technology Materials, Inc.
- 当前专利权人： Advanced Technology Materials, Inc.
- 当前专利权人地址： CT Danbury
- 主分类号： C04B35/495
- IPC分类号： C04B35/495 ; C04B35/497 ; C04B35/584 ; C04B35/622 ; C23C16/40 ; C23C16/56 ; H01L21/314 ; H01L21/316 ; H01L21/00
摘要：
A metal oxide ceramic layer is formed from an amorphous film. The metal oxide ceramic layer comprises, for example, a Bi-based oxide ceramic, The amorphous Bi-based metal oxide layer is annealed to transformed it into a ferroelectric layer. A lower thermal budget is needed to transform the amorphous Bi-based metal oxide ceramic into the ferroelectric phase.
公开/授权文献
- US5399535A Reticulated ceramic products 公开/授权日：1995-03-21
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