发明授权
- 专利标题: Boron-doped p-type single crystal silicon carbide semiconductor and process for preparing same
- 专利标题(中): 硼掺杂的p型单晶碳化硅半导体及其制备方法
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申请号: US704820申请日: 1996-08-28
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公开(公告)号: US6133120A公开(公告)日: 2000-10-17
- 发明人: Takeshi Miyajima , Norihito Tokura , Atsuo Fukumoto , Hidemitsu Hayashi
- 申请人: Takeshi Miyajima , Norihito Tokura , Atsuo Fukumoto , Hidemitsu Hayashi
- 申请人地址: JPX Kariya
- 专利权人: Nippondenso Co., Ltd.
- 当前专利权人: Nippondenso Co., Ltd.
- 当前专利权人地址: JPX Kariya
- 优先权: JPX7-219255 19950828
- 主分类号: H01L21/205
- IPC分类号: H01L21/205 ; C30B25/00 ; C30B25/02 ; H01L21/04 ; H01L21/20 ; H01L21/265 ; H01L21/336 ; H01L29/12 ; H01L29/24 ; H01L29/78 ; C01B31/36
摘要:
A p-type silicon carbide semiconductor having a high carrier concentration and activation rate is provided by doping boron as an acceptor impurity in a single crystal silicon carbide. The boron occupies silicon sites in a crystal lattice of the single crystal silicon carbide.
公开/授权文献
- US5162844A Image projection apparatus 公开/授权日:1992-11-10
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