发明授权
- 专利标题: Reflective mems actuator with a laser
- 专利标题(中): 带激光的反射式MEMs执行器
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申请号: US283030申请日: 1999-04-01
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公开(公告)号: US6134042A公开(公告)日: 2000-10-17
- 发明人: Vijayakumar R. Dhuler , David A. Koester , Mark D. Walters , Karen W. Markus
- 申请人: Vijayakumar R. Dhuler , David A. Koester , Mark D. Walters , Karen W. Markus
- 申请人地址: NC Research Triangle Park
- 专利权人: MCNC
- 当前专利权人: MCNC
- 当前专利权人地址: NC Research Triangle Park
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; B32B3/10 ; B81B3/00 ; B81C1/00 ; G02B26/08 ; H02N1/00
摘要:
An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.
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