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公开(公告)号：US6134042A
公开(公告)日：2000-10-17
申请号：US283030
申请日：1999-04-01
CPC分类号： G02B26/0841 , B81B3/0051 , G02B26/101 , B81B2201/042 , B81B2203/058 , Y10S359/90 , Y10T428/24273 , Y10T428/24322 , Y10T428/24355 , Y10T428/24479
摘要： An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.
摘要翻译： 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。
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2.发明授权
公开(公告)号：US5914801A
公开(公告)日：1999-06-22
申请号：US719711
申请日：1996-09-27
CPC分类号： G02B26/0841 , B81B3/0051 , G02B26/101 , B81B2201/042 , B81B2203/058 , Y10S359/90 , Y10T428/24273 , Y10T428/24322 , Y10T428/24355 , Y10T428/24479
摘要： An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.
摘要翻译： 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。
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公开(公告)号：US06555201B1
公开(公告)日：2003-04-29
申请号：US09570628
申请日：2000-05-15
IPC分类号： B32B310
CPC分类号： G02B26/0841 , B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/101 , Y10S359/90 , Y10T428/24273 , Y10T428/24322 , Y10T428/24355 , Y10T428/24479
摘要： An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.
摘要翻译： 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°的角度相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。
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4.发明授权公开(公告)号：US06256134B1
公开(公告)日：2001-07-03
申请号：US09628054
申请日：2000-07-28
IPC分类号： G02B2608
CPC分类号： G02B26/0841 , B81B3/0051 , B81B2201/042 , B81B2203/058 , G02B26/101 , Y10S359/90 , Y10T428/24273 , Y10T428/24322 , Y10T428/24355 , Y10T428/24479
摘要： An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.
摘要翻译： 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架围绕第二轴线旋转。 第一和第二轴优选地以90°的角度相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。
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5.发明授权
公开(公告)号：US6087747A
公开(公告)日：2000-07-11
申请号：US285206
申请日：1999-04-01
CPC分类号： G02B26/0841 , B81B3/0051 , G02B26/101 , B81B2201/042 , B81B2203/058 , Y10S359/90 , Y10T428/24273 , Y10T428/24322 , Y10T428/24355 , Y10T428/24479
摘要： An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90.degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.
摘要翻译： 机电装置包括其中具有第一孔的第一框架，悬挂在第一框架中的第二框架，其中第二框架在其中具有第二孔，以及悬挂在第二孔中的板。 第一对梁相对于第一框架沿着第一轴线支撑第二框架，使得第二框架围绕第一轴线旋转。 第二对梁相对于第二框架沿着第二轴支撑板，使得板相对于框架绕第二轴线旋转。 第一和第二轴优选地以90°角相交。 第一致动器提供用于使第二框架围绕第一轴线相对于第一框架旋转的机械力。 第二致动器提供用于相对于第二框架围绕第二轴线旋转板的机械力。 因此，板可以相对于第一轴线和第二轴线独立地旋转。 还公开了相关方法。
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6.发明授权Microactuators including a metal layer on distal portions of an arched beam 有权微型致动器包括在拱形梁的远端部分上的金属层公开(公告)号：US06255757B1
公开(公告)日：2001-07-03
申请号：US09388321
申请日：1999-09-01
IPC分类号： H02N1000
CPC分类号： F15C5/00 , B81B3/0051 , B81B2201/031 , B81B2201/054 , B81B2203/0109 , B81B2203/051 , B81C2203/031 , B81C2203/036 , F16K99/0001 , F16K99/0007 , F16K99/0009 , F16K99/0011 , F16K99/0036 , F16K2099/0074 , F16K2099/008 , H01H2001/0042
摘要： A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components arc actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening. The microactuator may further include metallization traces on distal portions of the arched beams to constrain the thermally actuated regions of arched beams to medial portions thereof. The valve may also include a latch for maintaining the valve plate in a desired position without requiring continuous energy input to the microactuator. An advantageous method for fabricating a MEMS valve having unitary structure single crystalline components is also provided.
摘要翻译： 提供了一种微机电（MEMS）装置，其包括微电子基板和热致动微致动器以及设置在基板上并由单晶材料形成为单一结构的相关部件，其中相关联的部件由微致动器在其热致动时被致动 。 例如，MEMS器件可以是阀。 因此，阀可以包括至少一个阀板，该阀板通过选择性地致动微致动器而可控制地与微电子衬底中的至少一个阀开口接合。 虽然MEMS器件可以包括各种微致动器，微致动器有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱起，使得微致动器在关闭位置之间移动，在该关闭位置中阀板密封地接合阀开口和打开位置，在该位置阀板至少部分地 与阀开口脱离并不密封。 微致动器还可以包括在拱形梁的远侧部分上的金属化迹线，以将拱形梁的热致动区域约束到其中间部分。 阀还可以包括用于将阀板保持在期望位置的闩锁，而不需要连续的能量输入到微致动器。 还提供了一种用于制造具有单一结构单晶组件的MEMS阀的有利方法。
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7.发明授权
公开(公告)号：US5994816A
公开(公告)日：1999-11-30
申请号：US936598
申请日：1997-09-24
IPC分类号： B81B3/00 , B81C1/00 , F03G7/06 , F15C5/00 , F16K99/00 , G02B6/38 , G02B6/42 , H01H1/00 , H01H9/14 , H01H61/00 , H01H61/02 , H01H65/00 , H01H67/26 , H04Q1/16 , H02K15/00
CPC分类号： F16K99/0001 , B81B3/0024 , B81B3/0054 , F03G7/06 , F15C5/00 , F16K99/0011 , F16K99/0044 , H01H1/0036 , H01H61/02 , B81B2201/031 , B81B2201/054 , B81B2203/0109 , B81B2203/051 , F16K2099/0071 , F16K2099/0074 , F16K2099/008 , F16K99/0034 , G02B6/3803 , G02B6/4226 , H01H2001/0042 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H61/00 , H01H67/26 , H01H9/14 , Y10T29/49105
摘要： A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
摘要翻译： 提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。 为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。 因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。 还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。 此外，还提供了一种制造MEMS致动器的方法。
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8.发明授权Microactuator for precisely aligning an optical fiber and an associated fabrication method 失效用于精确对准光纤的微致动器和相关的制造方法
公开(公告)号：US5870518A
公开(公告)日：1999-02-09
申请号：US916089
申请日：1997-08-21
CPC分类号： G02B6/4226 , G02B6/3803
摘要： A microactuator for precisely aligning an optical fiber with an optical device and an associated method of fabrication thereof. The microactuator includes a carrier positioned on a base for holding the optical fiber. An alignment frame positioned on the carrier remotely from the optical fiber is adapted to engage the base and the carrier. The carrier is movable relative to the base and the alignment frame. At least one actuator has a beam for engaging the alignment frame and a pad affixed to the carrier. The beam and pad move relative to each other when the actuator is actuated. The actuator is positioned on the carrier so that the beam engages and applies a force to the alignment frame in a predetermined direction when the actuator is actuated. This causes the pad to apply an opposite force to the carrier causing the carrier to move in a direction opposite the predetermined direction for controllably positioning the carrier relative to the base and precisely aligning the optical fiber with the optical device.
摘要翻译： 一种用于将光纤与光学装置精确对准的微致动器及其制造方法。 微致动器包括位于基座上用于保持光纤的载体。 定位在远离光纤的载体上的对准框架适于接合基座和载体。 托架可相对于基座和对准框架移动。 至少一个致动器具有用于接合对准框架的梁和固定到托架的垫。 当致动器被致动时，梁和垫相对于彼此移动。 致动器定位在载体上，使得当致动器致动时，梁在预定方向上接合并向对准框架施加力。 这使得焊盘对载体施加相反的力，导致载体在与预定方向相反的方向上移动，以便相对于底座可控地定位载体，并将光纤与光学装置精确对准。
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公开(公告)号：US06410361B2
公开(公告)日：2002-06-25
申请号：US09777749
申请日：2001-02-06
申请人： Vijayakumar R. Dhuler , Edward Hill , Allen Cowen
发明人： Vijayakumar R. Dhuler , Edward Hill , Allen Cowen
IPC分类号： H01L2100
CPC分类号： F16K99/0001 , B81B3/0024 , B81B2201/031 , F03G7/06 , F15C5/00 , F16K99/0007 , F16K99/0036 , F16K99/0042 , F16K2099/0074 , F16K2099/008 , H01H1/0036 , H01H37/32 , H01H2037/008 , Y10S310/06
摘要： A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator of the present invention may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate. In one embodiment the composite beam comprises two or layers having materials that have correspondingly different thermal coefficients of expansion. As such, the layers will respond differently when thermal energy is supplied to the composite. An electrically conductive path may extend throughout the composite beam to effectuate thermal actuation. In one embodiment of the invention a two layer composite beam comprises a first layer of a semiconductor material and a second layer of a metallic material. The semiconductor material may be selectively doped during fabrication so as to create a self-contained heating mechanism within the composite beam. The invention also comprises a MEMS thermal actuator that includes two or more composite beams. The two or more composite beams may be disposed in an array or a ganged fashion, such that the multiple composite beams benefit from overall force multiplication and are therefore capable of greater and more linear displacement distances. The invention is also embodied in a method for fabricating the MEMS thermal actuators of the present invention.
摘要翻译： 提供了一种MEMS热致动器装置，其能够在大致平行于衬底的表面的平面中提供线性位移。 此外，本发明的MEMS热致动器可以提供一种独立的加热机构，其允许使用较低的功率消耗和较低的工作温度来致动热致动器。 MEMS热致动器包括具有固定到第一表面的第一表面和至少一个锚定结构的微电子衬底。 复合梁从锚固体延伸并且覆盖在基底的第一表面上。 组合梁适于热致动，使得其可沿着基本上平行于微电子衬底的第一表面延伸的预定路径可控地偏转。 在一个实施例中，复合梁包括具有相应不同热膨胀系数的材料的两层或多层。 因此，当将热能提供给复合材料时，这些层将响应不同。 导电路径可延伸穿过复合梁，以实现热致动。 在本发明的一个实施例中，双层复合梁包括第一层半导体材料和第二层金属材料。 可以在制造期间选择性地掺杂半导体材料，以便在复合束内产生独立的加热机构。 本发明还包括包括两个或更多个复合梁的MEMS热致动器。 两个或多个复合梁可以以阵列或组合的方式设置，使得多个复合梁受益于总的力倍增，因此能够具有更大和更大的线性位移距离。 本发明还体现在本发明的MEMS热致动器的制造方法中。
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10.发明授权公开(公告)号：US06291922B1
公开(公告)日：2001-09-18
申请号：US09383053
申请日：1999-08-25
IPC分类号： H02N1000
CPC分类号： H01H1/0036 , H01H59/0009 , H01H61/02 , H01H61/04 , H01H2001/0078 , H01H2061/006
摘要： A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate, a microactuator disposed on the substrate and formed of a single crystalline material, and at least one metallic structure disposed on the substrate adjacent the microactuator such that the metallic structure is on substantially the same plane as the microactuator and is actuated thereby. For example, the MEMS device may be a microrelay. As such, the microrelay may include a pair of metallic structures that are controllably brought into contact by selective actuation of the microactuator. While the MEMS device can include various microactuators, one embodiment of the microactuator is a thermally actuated microactuator which advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch. In an alternate embodiment, the microactuator is an electrostatic microactuator which includes a stationary stator and a movable shuttle. Imposing an electrical bias between the stator and the shuttle causes the shuttle to move with respect to the stator. Thus, on actuation, the microactuator moves between a first position in which the microactuator is spaced apart from the at least one metallic structure to a second position in which the microactuator operably engages the at least one metallic structure. Several advantageous methods for fabricating a MEMS device having both single crystal components and metallic components are also provided.
摘要翻译： 提供了一种微机电（MEMS）器件，其包括微电子衬底，设置在衬底上并由单晶材料形成的微致动器，以及至少一个金属结构，其布置在与微致动器相邻的衬底上，使得金属结构基本上在 与微致动器相同的平面并由此致动。 例如，MEMS器件可以是微型继电器。 因此，微型继电器可以包括通过微致动器的选择性致动可控制地接触的一对金属结构。 虽然MEMS器件可以包括各种微致动器，微致动器的一个实施例是热致动微致动器，其有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱形。 在另一个实施例中，微型致动器是静电微型致动器，其包括固定式定子和可移动梭。 在定子和梭之间施加电偏压使梭子相对于定子移动。 因此，在致动时，微致动器在其中微致动器与至少一个金属结构间隔开的第一位置移动到第二位置，在第二位置，微致动器可操作地接合至少一个金属结构。 还提供了用于制造具有单晶组件和金属部件的MEMS器件的几种有利方法。
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