Invention Grant
- Patent Title: Tangential fan with cutoff assembly and vibration control for electric discharge laser
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Application No.: US400026Application Date: 1999-09-21
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Publication No.: US6144686APublication Date: 2000-11-07
- Inventor: Thomas Hofmann , James K. Howey , Robert A. Shannon , Richard C. Ujazdowski , Tom A. Watson , R. Kyle Webb
- Applicant: Thomas Hofmann , James K. Howey , Robert A. Shannon , Richard C. Ujazdowski , Tom A. Watson , R. Kyle Webb
- Applicant Address: CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: CA San Diego
- Main IPC: F16F15/10
- IPC: F16F15/10 ; G03F7/20 ; H01S3/036 ; H01S3/223 ; H01S3/225 ; H01S3/22
Abstract:
A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.
Public/Granted literature
- US5656449A Neutral unsymmetrical cyanine dyes Public/Granted day:1997-08-12
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