发明授权
US6151966A Semiconductor dynamical quantity sensor device having electrodes in
Rahmen structure
有权
具有Rahmen结构的电极的半导体动力传感器装置
- 专利标题： Semiconductor dynamical quantity sensor device having electrodes in Rahmen structure
- 专利标题（中）： 具有Rahmen结构的电极的半导体动力传感器装置
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申请号： US304849申请日： 1999-05-05
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公开(公告)号： US6151966A公开(公告)日： 2000-11-28
- 发明人: Minekazu Sakai , Yukihiro Takeuchi , Kazuhiko Kano , Seiji Fujino , Tsuyoshi Fukada , Hiroshige Sugito , Minoru Murata , Hiroshi Muto , Hirofumi Higuchi , Kenichi Ao
- 申请人： Minekazu Sakai , Yukihiro Takeuchi , Kazuhiko Kano , Seiji Fujino , Tsuyoshi Fukada , Hiroshige Sugito , Minoru Murata , Hiroshi Muto , Hirofumi Higuchi , Kenichi Ao
- 申请人地址： JPX Kariya
- 专利权人： Denso Corporation
- 当前专利权人： Denso Corporation
- 当前专利权人地址： JPX Kariya
- 优先权： JPX10-127419 19980511
- 主分类号： G01P15/08
- IPC分类号： G01P15/08 ; G01P15/125 ; H01L29/84 ; G01L1/00
摘要：
A semiconductor accelerometer device is formed on an SOI substrate by micro-machining. A movable unit is supported at both ends, and a weight portion is movable in response to acceleration exerted in the detection direction. A movable electrode is formed in a comb shape integrally with the weight portion. A pair of fixed electrodes in a comb shape are cantilevered and interleaved with the movable electrode to face the movable electrode. A plurality of through holes is provided in the electrodes so that the electrodes have Rahmen structure which is a series of rectangular frames. This structure reduces the weight of each electrode while increasing the strength against twist force. The electrodes are less likely from breaking in response to an acceleration exerted in a direction perpendicular to the normal detection direction because of reduced weight.
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