Invention Grant
- Patent Title: Method for forming SbSI thin films
- Patent Title (中): 形成SbSI薄膜的方法
-
Application No.: US252121Application Date: 1999-02-18
-
Publication No.: US6153262APublication Date: 2000-11-28
- Inventor: Raghvendra K. Pandey , Kanwal K. Raina , Narayanan Solayappan
- Applicant: Raghvendra K. Pandey , Kanwal K. Raina , Narayanan Solayappan
- Applicant Address: TX College Station
- Assignee: The Texas A&M University System
- Current Assignee: The Texas A&M University System
- Current Assignee Address: TX College Station
- Main IPC: C23C14/02
- IPC: C23C14/02 ; C23C14/06 ; C23C16/00
Abstract:
A method for forming SbSI thin films is formed. In the first step of the method, a substrate (14) is provided. Next a buffer layer (16) is formed on the substrate (14). Then, a SbSI source (12) is provided. The SbSI source (12) and buffer layer (16) with substrate (14) are placed in an ampoule (10). The ampoule is heated in a two-zone furnace (11). This causes the SbSI source (12) to form a vapor which reacts with the buffer layer (14) to form a thin film of SbSI.
Public/Granted literature
- US4898154A Adjustable fitting for fireplace insert flue connection Public/Granted day:1990-02-06
Information query
IPC分类: