发明授权
US6156601A Method of forming DRAM matrix of basic organizational units each with
pair of capacitors with hexagon shaped planar portion
有权
形成具有六边形平面部分的一对电容器的基本组织单元的DRAM矩阵的方法
- 专利标题: Method of forming DRAM matrix of basic organizational units each with pair of capacitors with hexagon shaped planar portion
- 专利标题(中): 形成具有六边形平面部分的一对电容器的基本组织单元的DRAM矩阵的方法
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申请号: US333961申请日: 1999-06-16
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公开(公告)号: US6156601A公开(公告)日: 2000-12-05
- 发明人: Chang Jae Lee , Won Suck Yang , Kong Hee Park
- 申请人: Chang Jae Lee , Won Suck Yang , Kong Hee Park
- 申请人地址: KRX Kyoungki-Do
- 专利权人: Hyundai Electronics Industries Co., Ltd.
- 当前专利权人: Hyundai Electronics Industries Co., Ltd.
- 当前专利权人地址: KRX Kyoungki-Do
- 优先权: KRX96-31664 19960731
- 主分类号: G11C11/34
- IPC分类号: G11C11/34 ; H01L21/8242 ; H01L27/108 ; H01L21/70
摘要:
A dynamic random access memory (DRAM) organized as a matrix of basic organizational units each having a capacitor pair. Each capacitor pair has one of the first capacitors and one of the second capacitors in it. Each basic organizational unit is arranged as follows: a first word line and a second word line are formed, as parallel lines, on the substrate; the first word line lies between a first doped region and a second doped region to define a first transistor; the second word line lies between the second doped region of the first transistor and a third doped regions to define a second transistor; a bit line lies on the second doped region of the substrate at an oblique angle to the first word line and second word line; the first capacitor overlies the first doped region and the first word line, is substantially centered over the first doped region, is connected to the first doped region via a first contact hole, and has a hexagon-shaped planar portion; the second capacitor overlies the third doped region and the second word line, is substantially centered over the third doped region, is connected to the third doped region via a second contact hole, and has a hexagon-shaped planar portion; and a center point of each of the first doped region, second doped region and third doped region of the basic organizational unit are connectable by an imaginary straight characteristic line.
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