发明授权
- 专利标题: Method for fabricating capacitor
- 专利标题(中): 制造电容器的方法
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申请号: US306093申请日: 1999-05-06
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公开(公告)号: US6159789A公开(公告)日: 2000-12-12
- 发明人: Shu-Ya Chuang , Anchor Chen
- 申请人: Shu-Ya Chuang , Anchor Chen
- 申请人地址: TWX Hsinchu
- 专利权人: United Semiconductor Corp.
- 当前专利权人: United Semiconductor Corp.
- 当前专利权人地址: TWX Hsinchu
- 优先权: TWX88103570 19990309
- 主分类号: H01L21/8242
- IPC分类号: H01L21/8242
摘要:
A method for fabricating a capacitor in DRAM. A horizontal buried doped region is formed in a substrate. A pad oxide layer and a mask layer are formed in sequence on the substrate. A plurality of first trenches is formed in the substrate. Thus, a plurality of bit lines is formed in the substrate. A plurality of second trenches is formed in the substrate to expose the surface of the bit lines, wherein the second trenches cross the first trenches. Thus, a plurality of silicon islands on the bit lines is formed. A first insulation layer is formed in the first trenches and the second trenches, wherein the sidewall of the silicon islands are partly exposed and doped regions are formed in the exposed sidewall. A gate oxide layer is formed on the sidewall of the silicon islands. A spacer is formed on the gate oxide layer. A second insulation layer is formed over the substrate. The mask layer and the pad oxide layer are removed to expose the top surfaces of the silicon islands. A patterned conductive layer is formed over the substrate. A dielectric layer and an upper electrode are formed in sequence over the substrate.
公开/授权文献
- US4890693A Knock-down support stand and kit for assembly thereof 公开/授权日:1990-01-02
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